Patents by Inventor Farshid TAZESH

Farshid TAZESH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION
    Publication number: 20230109695
    Abstract: Some embodiments are related to a method of or apparatus for forming an image of a buried structure that includes: emitting primary charged particles from a source; receiving a plurality of secondary charged particles from a sample; and forming an image based on received secondary charged particles that have an energy within a first range.
    Type: Application
    Filed: October 12, 2022
    Publication date: April 13, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Xuechen ZHU, Farshid TAZESH, Datong ZHANG, Weiming REN