Patents by Inventor Fatma Arzum Simsek-Ege

Fatma Arzum Simsek-Ege has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180166464
    Abstract: Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, vertically-stacked memory cells within the conductive levels, an insulative material over the stack and a select gate material over the insulative material. An opening extends through the select gate material, through the insulative material, and through the stack of alternating dielectric and conductive levels. A first region of the opening within the insulative material is wider along a cross-section than a second region of the opening within the select gate material, and is wider along the cross-section than a third region of the opening within the stack of alternating dielectric levels and conductive levels. Channel material is within the opening and adjacent the insulative material, the select gate material and the memory cells. Some embodiments include methods of forming vertically-stacked memory cells.
    Type: Application
    Filed: February 9, 2018
    Publication date: June 14, 2018
    Applicant: Micron Technology, Inc.
    Inventors: Jie Sun, Fatma Arzum Simsek-Ege
  • Patent number: 9991273
    Abstract: Floating gate memory cells in vertical memory. A control gate is formed between a first tier of dielectric material and a second tier of dielectric material. A floating gate is formed between the first tier of dielectric material and the second tier of dielectric material, wherein the floating gate includes a protrusion extending towards the control gate. A charge blocking structure is formed between the floating gate and the control gate, wherein at least a portion of the charge blocking structure wraps around the protrusion.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: June 5, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Charles H. Dennison, Akira Goda, John Hopkins, Fatma Arzum Simsek-Ege, Krishna K. Parat
  • Publication number: 20180061837
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Application
    Filed: July 31, 2017
    Publication date: March 1, 2018
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20180061835
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Application
    Filed: July 31, 2017
    Publication date: March 1, 2018
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20180061836
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Application
    Filed: July 31, 2017
    Publication date: March 1, 2018
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 9899413
    Abstract: Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, vertically-stacked memory cells within the conductive levels, an insulative material over the stack and a select gate material over the insulative material. An opening extends through the select gate material, through the insulative material, and through the stack of alternating dielectric and conductive levels. A first region of the opening within the insulative material is wider along a cross-section than a second region of the opening within the select gate material, and is wider along the cross-section than a third region of the opening within the stack of alternating dielectric levels and conductive levels. Channel material is within the opening and adjacent the insulative material, the select gate material and the memory cells. Some embodiments include methods of forming vertically-stacked memory cells.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: February 20, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Jie Sun, Fatma Arzum Simsek-Ege
  • Publication number: 20170373075
    Abstract: Some embodiments include apparatuses and methods having a source material, a dielectric material over the source material, a select gate material over the dielectric material, a memory cell stack over the select gate material, a conductive plug located in an opening of the dielectric material and contacting a portion of the source material, and a channel material extending through the memory cell stack and the select gate material and contacting the conductive plug.
    Type: Application
    Filed: August 24, 2017
    Publication date: December 28, 2017
    Inventors: Fatma Arzum Simsek-Ege, Krishna K. Parat, Luan C. Tran, Meng-Wei Kuo, Yushi Hu
  • Publication number: 20170365615
    Abstract: Floating gate memory cells in vertical memory. A control gate is formed between a first tier of dielectric material and a second tier of dielectric material. A floating gate is formed between the first tier of dielectric material and the second tier of dielectric material, wherein the floating gate includes a protrusion extending towards the control gate. A charge blocking structure is formed between the floating gate and the control gate, wherein at least a portion of the charge blocking structure wraps around the protrusion.
    Type: Application
    Filed: August 30, 2017
    Publication date: December 21, 2017
    Inventors: Charles H. Dennison, Akira Goda, John Hopkins, Fatma Arzum Simsek-Ege, Krishna K. Parat
  • Publication number: 20170352704
    Abstract: Various embodiments comprise apparatuses and methods, such as a memory stack having a continuous cell pillar. In various embodiments, the apparatus includes a source material, a buffer material, a select gate drain (SGD), and a memory stack arranged between the source material and the SGD. The memory stack comprises alternating levels of conductor materials and dielectric materials. A continuous channel-fill material forms a cell pillar that is continuous from the source material to at least a level corresponding to the SGD.
    Type: Application
    Filed: August 25, 2017
    Publication date: December 7, 2017
    Inventors: Fatma Arzum Simsek-Ege, Krishna K. Parat
  • Patent number: 9793282
    Abstract: Floating gate memory cells in vertical memory. A control gate is formed between a first tier of dielectric material and a second tier of dielectric material. A floating gate is formed between the first tier of dielectric material and the second tier of dielectric material, wherein the floating gate includes a protrusion extending towards the control gate. A charge blocking structure is formed between the floating gate and the control gate, wherein at least a portion of the charge blocking structure wraps around the protrusion.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: October 17, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Charles H. Dennison, Akira Goda, John Hopkins, Fatma Arzum Simsek-Ege, Krishna K. Parat
  • Patent number: 9780102
    Abstract: Some embodiments include apparatuses and methods having a source material, a dielectric material over the source material, a select gate material over the dielectric material, a memory cell stack over the select gate material, a conductive plug located in an opening of the dielectric material and contacting a portion of the source material, and a channel material extending through the memory cell stack and the select gate material and contacting the conductive plug.
    Type: Grant
    Filed: November 7, 2014
    Date of Patent: October 3, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Krishna K. Parat, Luan C. Tran, Meng-Wei Kuo, Yushi Hu
  • Patent number: 9773841
    Abstract: Various embodiments comprise apparatuses and methods, such as a memory stack having a continuous cell pillar. In various embodiments, the apparatus includes a source material, a buffer material, a select gate drain (SGD), and a memory stack arranged between the source material and the SGD. The memory stack comprises alternating levels of conductor materials and dielectric materials. A continuous channel-fill material forms a cell pillar that is continuous from the source material to at least a level corresponding to the SGD.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: September 26, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Krishna K. Parat
  • Patent number: 9754952
    Abstract: Floating gate memory cells in vertical memory. A control gate is formed between a first tier of dielectric material and a second tier of dielectric material. A floating gate is formed between the first tier of dielectric material and the second tier of dielectric material, wherein the floating gate includes a protrusion extending towards the control gate. A charge blocking structure is formed between the floating gate and the control gate, wherein at least a portion of the charge blocking structure wraps around the protrusion.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: September 5, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Charles H. Dennison, Akira Goda, John Hopkins, Fatma Arzum Simsek-Ege, Krishna K. Parat
  • Publication number: 20170200737
    Abstract: Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, vertically-stacked memory cells within the conductive levels, an insulative material over the stack and a select gate material over the insulative material. An opening extends through the select gate material, through the insulative material, and through the stack of alternating dielectric and conductive levels. A first region of the opening within the insulative material is wider along a cross-section than a second region of the opening within the select gate material, and is wider along the cross-section than a third region of the opening within the stack of alternating dielectric levels and conductive levels. Channel material is within the opening and adjacent the insulative material, the select gate material and the memory cells. Some embodiments include methods of forming vertically-stacked memory cells.
    Type: Application
    Filed: March 28, 2017
    Publication date: July 13, 2017
    Inventors: Jie Sun, Fatma Arzum Simsek-Ege
  • Publication number: 20170133392
    Abstract: Vertical memories and methods of making the same are discussed generally herein. In one embodiment, a vertical memory can include a vertical pillar extending to a source, an etch stop tier over the source, and a stack of alternating dielectric tiers and conductive tiers over the etch stop tier. The etch stop tier can comprise a blocking dielectric adjacent to the pillar. In another embodiment, the etch stop tier can comprise a blocking dielectric adjacent to the pillar, and a plurality of dielectric films horizontally extending from the blocking dielectric into the etch stop tier.
    Type: Application
    Filed: January 19, 2017
    Publication date: May 11, 2017
    Inventors: Fatma Arzum Simsek-Ege, John Hopkins, Srikant Jayanti
  • Patent number: 9634025
    Abstract: Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, vertically-stacked memory cells within the conductive levels, an insulative material over the stack and a select gate material over the insulative material. An opening extends through the select gate material, through the insulative material, and through the stack of alternating dielectric and conductive levels. A first region of the opening within the insulative material is wider along a cross-section than a second region of the opening within the select gate material, and is wider along the cross-section than a third region of the opening within the stack of alternating dielectric levels and conductive levels. Channel material is within the opening and adjacent the insulative material, the select gate material and the memory cells. Some embodiments include methods of forming vertically-stacked memory cells.
    Type: Grant
    Filed: August 26, 2016
    Date of Patent: April 25, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Jie Sun, Fatma Arzum Simsek-Ege
  • Patent number: 9559109
    Abstract: Vertical memories and methods of making the same are discussed generally herein. In one embodiment, a vertical memory can include a vertical pillar extending to a source, an etch stop tier over the source, and a stack of alternating dielectric tiers and conductive tiers over the etch stop tier. The etch stop tier can comprise a blocking dielectric adjacent to the pillar. In another embodiment, the etch stop tier can comprise a blocking dielectric adjacent to the pillar, and a plurality of dielectric films horizontally extending from the blocking dielectric into the etch stop tier.
    Type: Grant
    Filed: June 22, 2015
    Date of Patent: January 31, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, John Hopkins, Srikant Jayanti
  • Publication number: 20170012053
    Abstract: Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, vertically-stacked memory cells within the conductive levels, an insulative material over the stack and a select gate material over the insulative material. An opening extends through the select gate material, through the insulative material, and through the stack of alternating dielectric and conductive levels. A first region of the opening within the insulative material is wider along a cross-section than a second region of the opening within the select gate material, and is wider along the cross-section than a third region of the opening within the stack of alternating dielectric levels and conductive levels. Channel material is within the opening and adjacent the insulative material, the select gate material and the memory cells. Some embodiments include methods of forming vertically-stacked memory cells.
    Type: Application
    Filed: August 26, 2016
    Publication date: January 12, 2017
    Inventors: Jie Sun, Fatma Arzum Simsek-Ege
  • Publication number: 20160336341
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Application
    Filed: July 27, 2016
    Publication date: November 17, 2016
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatma Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Publication number: 20160293623
    Abstract: Some embodiments include a method of forming vertically-stacked memory cells. An opening is formed through a stack of alternating insulative and conductive levels. Cavities are formed to extend into the conductive levels. Regions of the insulative levels remain as ledges which separate adjacent cavities from one another. Material is removed from the ledges to thin the ledges, and then charge-blocking dielectric and charge-storage structures are formed within the cavities. Some embodiments include an integrated structure having a stack of alternating insulative levels and conductive levels. Cavities extend into the conductive levels. Ledges of the insulative levels separate adjacent cavities from one another. The ledges are thinned relative to regions of the insulative levels not encompassed by the ledges. Charge-blocking dielectric and charge-storage structures are within the cavities.
    Type: Application
    Filed: April 6, 2015
    Publication date: October 6, 2016
    Inventors: Fatma Arzum Simsek-Ege, Meng-Wei Kuo, John D. Hopkins