Abstract: A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.

Abstract: A layer on a large area substrate is patterned by providing a large area substrate in the optical path of a plurality of charged particle beams that are emitted from charged particle emitters. Each charged particle beam has an emitted beam current of at least I0, and the beam current on the substrate is at least 0.4 I0. Each charged particle beam is deflected in at least one dimension and is switched on and off to generate an exposed pattern on the photoresist film.

Abstract: A method and apparatus for testing a plurality of electronic devices on a large area substrate is described. The apparatus includes a prober positioning assembly coupled to a substrate support within a testing chamber. The substrate support is a testing table capable of movement in X, Y and Z axes and the prober positioning assembly is capable of movement relative to the testing table. A prober exchanger is positioned adjacent the testing chamber and facilitates prober transfer through cooperative and relative movement with the prober positioning assembly. A load lock chamber having a single transfer door actuator, an atmospheric substrate lift, and a plurality of substrate alignment members is also described.

Abstract: A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

Abstract: A continuity test system adapted for testing individual contact pins within a flat panel test system is disclosed. The method and apparatus is designed to test continuity of individual contact pins via connection of a contact test pad assembly to a plurality of pins within a user defined pin arrangement. The contact test pad assembly has a plurality of contact points mounted thereon adapted to be in communication with individual contact pins within the defined pin arrangement. The system uses a test circuit in communication with the contact test pad assembly that is in communication with a power source and a controller that receives continuity information from the circuit and provides results to a user.

Abstract: A method and integrated system for electron beam testing a substrate is provided. In one aspect, the integrated system includes an electron beam testing chamber having a substrate table disposed therein. The substrate table is capable of moving a substrate within the testing chamber in both horizontal and vertical directions. The system also includes a load lock chamber disposed adjacent a first side of the testing chamber, and a prober storage assembly disposed beneath the testing chamber. A prober transfer assembly is disposed adjacent a second side of the testing chamber and arranged to transfer one or more probers between the prober storage assembly and the testing chamber. Further, one or more electron beam testing devices are disposed on an upper surface of the testing chamber.

Abstract: A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.

Abstract: An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.