Patents by Inventor Feilong Lin

Feilong Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection system with grounded capacitive sample proximity sensor
    Patent number: 10837803
    Abstract: A capacitive proximity measurement system may include a sensor electrode configured to be positioned proximate to a conductive measurement area on a test surface of a sample, a plate connector configured to provide an electrical connection between a system ground and a conductive plate parallel to the test surface, and a controller. A measurement circuit may be formed between the sensor electrode and the conductive plate, where the test surface is electrically floating with respect to the sensor electrode and the conductive plate. The controller may further adjust a voltage of the sensor electrode with respect to the conductive plate, determine a capacitance associated with the measurement circuit, and determine a distance between the electrode and the measurement area based on the capacitance associated with the measurement circuit.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: November 17, 2020
    Assignee: KLA Corporation
    Inventors: Yang Xie, Feilong Lin, Rushford A. Ogden
  • Inspection System with Grounded Capacitive Sample Proximity Sensor
    Publication number: 20200326211
    Abstract: A capacitive proximity measurement system may include a sensor electrode configured to be positioned proximate to a conductive measurement area on a test surface of a sample, a plate connector configured to provide an electrical connection between a system ground and a conductive plate parallel to the test surface, and a controller. A measurement circuit may be formed between the sensor electrode and the conductive plate, where the test surface is electrically floating with respect to the sensor electrode and the conductive plate. The controller may further adjust a voltage of the sensor electrode with respect to the conductive plate, determine a capacitance associated with the measurement circuit, and determine a distance between the electrode and the measurement area based on the capacitance associated with the measurement circuit.
    Type: Application
    Filed: May 2, 2019
    Publication date: October 15, 2020
    Inventors: Yang Xie, Feilong Lin, Rushford A. Ogden