Patents by Inventor Fei-Yun Chen

Fei-Yun Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250176232
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including an isolation structure extending into a front-side surface of a substrate. The isolation structure laterally encloses a first device region of the substrate. The isolation structure comprises a pair of isolation edges elongated in a first direction and at least partially defining the first device region. A pair of source/drain regions is disposed within the first device region and laterally spaced from one another in the first direction. A first gate electrode structure is disposed in the first device region between the pair of source/drain regions. The first gate electrode structure comprises a first pair of opposing sidewalls elongated in the first direction. The opposing sidewalls are laterally offset from a corresponding isolation edge in the pair of isolation edges by a non-zero distance in a direction towards a center of the first gate electrode structure.
    Type: Application
    Filed: November 27, 2023
    Publication date: May 29, 2025
    Inventors: Yi-Huan Chen, Yu-Chang Jong, Fei-Yun Chen, Chien-Chih Chou, Chia-Jui Lee
  • Publication number: 20250107215
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a first capacitor conductor disposed over an isolation structure arranged within a substrate. The isolation structure laterally extends past opposing outer sidewalls of the first capacitor conductor. A capacitor dielectric is arranged along one of the opposing outer sidewalls of the first capacitor conductor and over a top surface of the first capacitor conductor. A second capacitor conductor is arranged along an outer sidewall of the capacitor dielectric and over a top surface of the capacitor dielectric. The second capacitor conductor laterally overlaps parts of both the capacitor dielectric and the first capacitor conductor.
    Type: Application
    Filed: September 22, 2023
    Publication date: March 27, 2025
    Inventors: Jhu-Min Song, Ying-Chou Chen, Yi-Kai Ciou, Chi-Te Lin, Yi-Huan Chen, Chien-Chih Chou, Fei-Yun Chen, Yu-Chang Jong
  • Publication number: 20250089324
    Abstract: A gate oxide layer for a high voltage transistor is formed using methods that avoid thinning in the corners of the gate oxide layer. A recess is formed in a silicon substrate. The exposed surfaces of the recess are thermally oxidized to form a thermal oxide layer of the gate oxide layer. A high temperature oxide layer of the gate oxide layer is then formed within the exposed surfaces of the recess by chemical vapor deposition. The combination of the thermal oxide layer and the high temperature oxide layer results in a gate oxide layer that does not exhibit the double hump phenomenon in the drain current vs. gate voltage curve. The high temperature oxide layer may include a rim that extends out of the recess.
    Type: Application
    Filed: September 8, 2023
    Publication date: March 13, 2025
    Inventors: Jhu-Min Song, Yi-Kai Ciou, Chi-Te Lin, Yi-Huan Chen, Szu-Hsien Liu, Chan-Yu Hung, Chien-Chih Chou, Fei-Yun Chen
  • Publication number: 20250081509
    Abstract: Some embodiments relate to an integrated circuit device incorporating an etched recessed gate dielectric region. The integrated circuit device includes a substrate including a first upper surface, a gate dielectric region disposed at the first upper surface of the substrate and extending into the substrate, and a gate structure disposed over the gate dielectric region. The gate dielectric region includes a second upper surface and forms a recess extending below the second upper surface. The second upper surface includes a perimeter portion surrounding the recess. The gate structure completely covers the second upper surface of the gate dielectric region and extends into the recess.
    Type: Application
    Filed: August 29, 2023
    Publication date: March 6, 2025
    Inventors: Jhu-Min Song, Yi-Kai Ciou, Chi-Te Lin, Ying-Chou Chen, Jiou-Kang Lee, Yi-Huan Chen, Chien-Chih Chou, Fei-Yun Chen
  • Publication number: 20250063750
    Abstract: The present disclosure describes a structure with a conductive plate and a method for forming the structure. The structure includes a gate structure disposed on a diffusion region of a substrate, a protective layer in contact with the diffusion region and covering a sidewall of the gate structure and a portion of a top surface of the gate structure, and a first insulating layer in contact with the gate structure and the protective layer. The structure further includes a conductive plate in contact with the first insulating layer, where a first portion of the conductive plate laterally extends over a horizontal portion of the protective layer, and where a second portion of the conductive plate extends over a sidewall portion of the protective layer covering the sidewall of the gate structure. The structure further includes a second insulating layer in contact with the conductive plate.
    Type: Application
    Filed: November 7, 2024
    Publication date: February 20, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chan-Yu HUNG, Chia-Cheng Ho, Fei-Yun Chen, Yu-Chang Jong, Puo-Yu Chiang, Tun-Yi Ho
  • Publication number: 20250006731
    Abstract: A high voltage transistor may include a plurality of source/drain regions, a gate structure, and a gate oxide layer that enables the gate structure to selectively control a channel region between the source/drain regions. The gate oxide layer may extend laterally outward toward one or more of the plurality of source/drain regions such that at least a portion of the gate oxide layer is not under the gate structure. The gate oxide layer extending laterally outward from under the gate structure enables the gate oxide layer to be used as a self-aligned structure for forming the source/drain regions of the high voltage transistor. In particular, the gate oxide layer extending laterally outward from under the gate structure enables the gate oxide layer to be used to form the source/drain regions at a greater spacing from the gate structure without the use of additional implant masks when forming the source/drain regions.
    Type: Application
    Filed: June 30, 2023
    Publication date: January 2, 2025
    Inventors: Kau-Chu LIN, Chan-yu HUNG, Fei-Yun CHEN
  • Patent number: 12166108
    Abstract: The present disclosure describes a structure with a conductive plate and a method for forming the structure. The structure includes a gate structure disposed on a diffusion region of a substrate, a protective layer in contact with the diffusion region and covering a sidewall of the gate structure and a portion of a top surface of the gate structure, and a first insulating layer in contact with the gate structure and the protective layer. The structure further includes a conductive plate in contact with the first insulating layer, where a first portion of the conductive plate laterally extends over a horizontal portion of the protective layer, and where a second portion of the conductive plate extends over a sidewall portion of the protective layer covering the sidewall of the gate structure. The structure further includes a second insulating layer in contact with the conductive plate.
    Type: Grant
    Filed: May 18, 2022
    Date of Patent: December 10, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chan-Yu Hung, Chia-Cheng Ho, Fei-Yun Chen, Yu-Chang Jong, Puo-Yu Chiang, Tun-Yi Ho
  • Publication number: 20240258373
    Abstract: An integrated chip including a first source/drain region and a second source/drain region in a semiconductor substrate and laterally spaced apart along a top surface of the substrate. A gate dielectric layer is over the substrate and extends laterally between the first source/drain region and the second source/drain region. A thickness of the gate dielectric layer along a first sidewall of the gate dielectric layer is less than an average thickness of the gate dielectric layer. A trench isolation layer extends along gate dielectric layer. A first sidewall of the trench isolation layer extends along the first sidewall of the gate dielectric layer. A gate layer is directly over the gate dielectric layer and between the first source/drain region and the second source/drain region. A first sidewall of the gate layer is directly over the gate dielectric layer and laterally setback from the first sidewall of the gate dielectric layer.
    Type: Application
    Filed: February 1, 2023
    Publication date: August 1, 2024
    Inventors: Ta-Yuan Kung, Chen-Liang Chu, Chih-Wen Albert Yao, Fei-Yun Chen, Ming-Ta Lei, Ruey-Hsin Liu, Yu-Chang Jong
  • Publication number: 20240113187
    Abstract: The present disclosure relates to an integrated chip. The integrated chip includes a substrate having one or more interior surfaces forming a recess within an upper surface of the substrate. Source/drain regions are disposed within the substrate on opposing sides of the recess. A first gate dielectric is arranged along the one or more interior surfaces forming the recess, and a second gate dielectric is arranged on the first gate dielectric and within the recess. A gate electrode is disposed on the second gate dielectric. The second gate dielectric includes one or more protrusions that extend outward from a recessed upper surface of the second gate dielectric and that are arranged along opposing sides of the second gate dielectric.
    Type: Application
    Filed: January 5, 2023
    Publication date: April 4, 2024
    Inventors: Jhu-Min Song, Ying-Chou Chen, Yi-Kai Ciou, Chien-Chih Chou, Fei-Yun Chen, Yu-Chang Jong, Chi-Te Lin
  • Publication number: 20240097051
    Abstract: A Schottky diode includes a substrate, a first drift region in the substrate, a second drift region in the substrate, a first dielectric layer disposed over the substrate, a first doped region in the first drift region, a second doped region in the second drift region, a third doped region in the first drift region, and a metal field plate disposed over the first dielectric layer. The first drift region and the first doped region include a first conductivity type. The second drift region, the second doped region and third doped region include a second conductivity type complementary to the first conductivity type. The first dielectric layer overlaps a portion of the first drift region and a portion of the second drift region. The second doped region is separated from the first doped region.
    Type: Application
    Filed: January 16, 2023
    Publication date: March 21, 2024
    Inventors: GUAN-YI LI, CHIA-CHENG HO, CHAN-YU HUNG, FEI-YUN CHEN
  • Publication number: 20240071833
    Abstract: The present disclosure relates to a semiconductor device with a hybrid fin-dielectric region. The semiconductor device includes a substrate, a source region and a drain region laterally separated by a hybrid fin-dielectric (HFD) region. A gate electrode is disposed above the HFD region and the HFD region includes a plurality of fins covered by a dielectric and separated from the source region and the drain region by the dielectric.
    Type: Application
    Filed: August 25, 2022
    Publication date: February 29, 2024
    Inventors: Yi-Huan Chen, Huan-Chih Yuan, Yu-Chang Jong, Scott Yeh, Fei-Yun Chen, Yi-Hao Chen, Ting-Wei Chou
  • Publication number: 20240047542
    Abstract: A semiconductor device and a method of manufacturing a semiconductor device are provided. The semiconductor device includes a source region, a drain region, a gate region and a gate oxide. The gate region is disposed between the source region and the drain region. The gate oxide is disposed on the gate region. A bottom interface is between the gate region and the gate oxide, and an entire of the bottom interface is substantially flat.
    Type: Application
    Filed: August 3, 2022
    Publication date: February 8, 2024
    Inventors: JHIH-BIN CHEN, HUNG-SHU HUANG, JHU-MIN SONG, CHIEN-CHIH CHOU, YU-CHANG JONG, FEI-YUN CHEN
  • Publication number: 20240030292
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a deep trench isolation (DTI), an interconnect structure, and a conductive pillar. The DTI is disposed in the substrate and the interconnect structure is disposed over the substrate. The conductive pillar extends from the interconnect structure toward the substrate and penetrates the DTI. A method of manufacturing the semiconductor structure is also provided.
    Type: Application
    Filed: July 20, 2022
    Publication date: January 25, 2024
    Inventors: CHIA-CHENG HO, CHIA-YU WEI, CHAN-YU HUNG, FEI-YUN CHEN, YU-CHANG JONG
  • Publication number: 20230378324
    Abstract: The present disclosure describes a structure with a conductive plate and a method for forming the structure. The structure includes a gate structure disposed on a diffusion region of a substrate, a protective layer in contact with the diffusion region and covering a sidewall of the gate structure and a portion of a top surface of the gate structure, and a first insulating layer in contact with the gate structure and the protective layer. The structure further includes a conductive plate in contact with the first insulating layer, where a first portion of the conductive plate laterally extends over a horizontal portion of the protective layer, and where a second portion of the conductive plate extends over a sidewall portion of the protective layer covering the sidewall of the gate structure. The structure further includes a second insulating layer in contact with the conductive plate.
    Type: Application
    Filed: May 18, 2022
    Publication date: November 23, 2023
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chan-Yu Hung, Chia-Cheng Ho, Fei-Yun Chen, Yu-Chang Jong, Puo-Yu Chiang, Tun-Yi Ho
  • Publication number: 20200215153
    Abstract: This disclosure provides for a method of treating and/or preventing cancer in a subject by targeting the BIK degradation pathway in combination with the administration of an active BIKDD. Also described herein are compositions comprising an active BIKDD and methods of their making an use for the treatment of cancer.
    Type: Application
    Filed: December 12, 2019
    Publication date: July 9, 2020
    Inventors: Ruey-Hwa CHEN, Fei-Yun CHEN, Min-Yu HUANG
  • Patent number: 9466681
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Grant
    Filed: June 12, 2015
    Date of Patent: October 11, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Fei-Yun Chen, Chih-Wen Albert Yao
  • Publication number: 20150279951
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Application
    Filed: June 12, 2015
    Publication date: October 1, 2015
    Inventors: Chen-Liang Chu, Fei-Yun Chen, Chih-Wen Yao
  • Patent number: 9035380
    Abstract: An integrated circuit includes a high-voltage well having a first doping type, a first doped region and a second doped region embedded in the high-voltage well, the first and second doped regions having a second doping type and spaced apart by a channel in the high-voltage well, source/drain regions formed in the first doped region and in the second doped region, each of the source/drain regions having the second doping type and more heavily doped than the first and second doped regions, first isolation regions spaced apart from each of the source/drain regions, and resistance protection oxide forming a ring surrounding each of the source/drain regions.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: May 19, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Sheng Chen, Chen-Liang Chu, Shih-Kuang Hsiao, Fei-Yun Chen, Kong-Beng Thei
  • Publication number: 20140145261
    Abstract: An integrated circuit includes a high-voltage well having a first doping type, a first doped region and a second doped region embedded in the high-voltage well, the first and second doped regions having a second doping type and spaced apart by a channel in the high-voltage well, source/drain regions formed in the first doped region and in the second doped region, each of the source/drain regions having the second doping type and more heavily doped than the first and second doped regions, first isolation regions spaced apart from each of the source/drain regions, and resistance protection oxide forming a ring surrounding each of the source/drain regions.
    Type: Application
    Filed: November 27, 2012
    Publication date: May 29, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company
    Inventors: Yi-Sheng Chen, Chen-Liang Chu, Shih-Kuang Hsiao, Fei-Yun Chen, Kong-Beng Thei
  • Patent number: 8691100
    Abstract: A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: April 8, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Dah-Chuen Ho, Eugene Chu, Yuh-Haw Chang, Fei-Yun Chen, Michael Wu, Eric Chao