Patents by Inventor Felipe Soberon

Felipe Soberon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9842726
    Abstract: A method for monitoring at least one process parameter of a plasma process being performed on a semiconductor wafer, surface or surface and determine arc events occurring within the plasma tool chamber. The method comprises the steps of detecting the modulated light being generated from the plasma sheath during the plasma process; sampling RF voltage and current signals from the RF transmission line; processing the detected modulated light and the RF signals to produce at least one monitor statistic for the plasma process, and process the monitor signal to determine the occurrence of arcing events during the wafer processing.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: December 12, 2017
    Assignee: Verity Instruments, Inc.
    Inventors: Stephen Daniels, Shane Glynn, Felipe Soberon, Paul Maguire
  • Publication number: 20170232132
    Abstract: A flexible electrode assembly for an air treatment device comprising: a flexible dielectric layer forming an insulating sheet; a plurality of conductive tracks on a first side of the insulating sheet; a conductive layer on a second side of the insulating sheet; wherein supply of voltage to the conducting tracks and the conductive layer generates plasma which is discharged from the conducting tracks. In a further aspect, the present invention also provides an air treatment apparatus for removal of health threatening airborne pollutants, which may include pathogens, from an air flow, the air treatment apparatus comprising an apparatus having a generally cyclonic-shaped geometry comprising a cylindrical section and a conical section. The present invention also relates to an air treatment device comprising the flexible electrode assembly.
    Type: Application
    Filed: August 12, 2015
    Publication date: August 17, 2017
    Applicant: Novaerus Patents Limited
    Inventors: Graham Deane, Kevin Maughan, Felipe Soberon, Niall O'Connor
  • Publication number: 20160268108
    Abstract: A method for monitoring at least one process parameter of a plasma process being performed on a semiconductor wafer, surface or surface and determine arc events occurring within the plasma tool chamber. The method comprises the steps of detecting the modulated light being generated from the plasma sheath during the plasma process; sampling RF voltage and current signals from the RF transmission line; processing the detected modulated light and the RF signals to produce at least one monitor statistic for the plasma process, and process the monitor signal to determine the occurrence of arcing events during the wafer processing.
    Type: Application
    Filed: August 12, 2010
    Publication date: September 15, 2016
    Inventors: Stephen DANIELS, Shane Glynn, Felipe Soberon, Paul Maguire
  • Patent number: 9370599
    Abstract: A coil assembly for generating plasma, is disclosed. The coil assembly includes a cylindrical coil having a cylindrical inner mesh, a cylindrical outer mesh and a cylindrical dielectric separating the inner and outer meshes, an insulating stand at each of the first and second end of the cylindrical coil configured for mounting the cylindrical coil in an elevated position, wherein supply of voltage to the inner and outer meshes generates plasma which is discharged from the outer mesh.
    Type: Grant
    Filed: July 22, 2015
    Date of Patent: June 21, 2016
    Assignee: Novaerus Patents Limited
    Inventors: Graham Deane, Kevin Maughan, Felipe Soberon
  • Patent number: 9327048
    Abstract: An air treatment device having a plasma generator electrostatic precipitator assembly, is provided. The assembly includes an electrostatic precipitator configured to charge airborne particles in the vicinity of the electrostatic precipitator to provide charged airborne particles, and a plasma generator positioned in proximity to the electrostatic precipitator and configured for cooperation with the electrostatic precipitator. The plasma generator is configured to discharge plasma and provide an inactivation zone in the region of the plasma generator operable to inactivate airborne particles. The air treatment device directs the charged airborne particles generated by the electrostatic precipitator into the inactivation zone such that the air treatment device is adapted to generate charged airborne particles and then immediately, to direct the charged airborne particles into the inactivation zone so as to expose the charged airborne particles to plasma in the inactivation zone.
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: May 3, 2016
    Assignee: Novaerus Patents Limited
    Inventors: Graham Deane, Kevin Maughan, Felipe Soberon, Niall O'Connor
  • Publication number: 20160015850
    Abstract: An air treatment device having a plasma generator electrostatic precipitator assembly, is provided. The assembly includes an electrostatic precipitator configured to charge airborne particles in the vicinity of the electrostatic precipitator to provide charged airborne particles, and a plasma generator positioned in proximity to the electrostatic precipitator and configured for cooperation with the electrostatic precipitator. The plasma generator is configured to discharge plasma and provide an inactivation zone in the region of the plasma generator operable to inactivate airborne particles. The air treatment device includes means for directing the charged airborne particles generated by the electrostatic precipitator into the inactivation zone such that the air treatment device is adapted to generate charged airborne particles and then immediately, to direct the charged airborne particles into the inactivation zone so as to expose the charged airborne particles to plasma in the inactivation zone.
    Type: Application
    Filed: July 23, 2015
    Publication date: January 21, 2016
    Inventors: Graham Deane, Kevin Maughan, Felipe Soberon, Niall O'Connor
  • Publication number: 20150343109
    Abstract: A coil assembly for generating plasma, is disclosed. The coil assembly includes a cylindrical coil having a cylindrical inner mesh, a cylindrical outer mesh and a cylindrical dielectric separating the inner and outer meshes, an insulating stand at each of the first and second end of the cylindrical coil configured for mounting the cylindrical coil in an elevated position, wherein supply of voltage to the inner and outer meshes generates plasma which is discharged from the outer mesh.
    Type: Application
    Filed: April 3, 2015
    Publication date: December 3, 2015
    Inventors: Graham Deane, Kevin Maughan, Felipe Soberon
  • Publication number: 20150351212
    Abstract: A coil assembly for generating plasma, is disclosed. The coil assembly includes a cylindrical coil having a cylindrical inner mesh, a cylindrical outer mesh and a cylindrical dielectric separating the inner and outer meshes, an insulating stand at each of the first and second end of the cylindrical coil configured for mounting the cylindrical coil in an elevated position, wherein supply of voltage to the inner and outer meshes generates plasma which is discharged from the outer mesh.
    Type: Application
    Filed: July 22, 2015
    Publication date: December 3, 2015
    Inventors: Graham Deane, Kevin Maughan, Felipe Soberon
  • Publication number: 20150343456
    Abstract: An air treatment device having a plasma generator electrostatic precipitator assembly, is provided. The assembly includes an electrostatic precipitator configured to charge airborne particles in the vicinity of the electrostatic precipitator to provide charged airborne particles, and a plasma generator positioned in proximity to the electrostatic precipitator and configured for cooperation with the electrostatic precipitator. The plasma generator is configured to discharge plasma and provide an inactivation zone in the region of the plasma generator operable to inactivate airborne particles. The air treatment device includes means for directing the charged airborne particles generated by the electrostatic precipitator into the inactivation zone such that the air treatment device is adapted to generate charged airborne particles and then immediately, to direct the charged airborne particles into the inactivation zone so as to expose the charged airborne particles to plasma in the inactivation zone.
    Type: Application
    Filed: May 28, 2015
    Publication date: December 3, 2015
    Inventors: Graham Deane, Kevin Maughan, Felipe Soberon, Niall O'Connor
  • Patent number: 8945467
    Abstract: A method and apparatus for sterilizing an article. The method comprises placing an article in a sterilization container, generating oxidizing plasma radicals at atmospheric pressure, and providing the oxidizing plasma radicals to the sterilization container to sterilize the article in the container.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: February 3, 2015
    Assignee: Arann Healthcare Ltd.
    Inventors: Felipe Soberon, Shane Glynn, Paul Maguire, Stephen Daniels
  • Publication number: 20130136655
    Abstract: A method and apparatus for sterilising an article. The method comprises placing an article in a sterilisation container, generating oxidizing plasma radicals at atmospheric pressure, and providing the oxidizing plasma radicals to the sterilisation container to sterilise the article in the container.
    Type: Application
    Filed: February 17, 2011
    Publication date: May 30, 2013
    Inventors: Felipe Soberon, Shane Glynn, Paul Maguire, Stephen Daniels
  • Publication number: 20100216263
    Abstract: Method and apparatus for measuring process parameters of a plasma etch process. A method for detecting at least one process parameter of a plasma etch process being performed on a semiconductor wafer. The method comprises the steps of detecting light being generated from the plasma during the etch process, filtering the detected light to extract modulated light; and processing the detected modulated light to determine at least one process parameter of the etch process.
    Type: Application
    Filed: January 31, 2008
    Publication date: August 26, 2010
    Applicant: LEXAS RESEARCH, LTD.
    Inventors: Stephen Daniels, Shane Glynn, Felipe Soberon, Maria Tipaka