Abstract: An air treatment apparatus, system and method for removal of health threatening airborne pollutants from an airflow is provided. The air treatment apparatus includes a ducting section having an inactivation zone created by either a plasma-generating flexible electrode alone, a UV light source alone, or a combination of a plasma-generating flexible electrode and a UV light source disposed within the interior of the ducting section, wherein the airflow and airborne pollutants are urged into the inactivation zone ensuring multiple exposures of airborne pollutant material into the inactivation zone resulting in purified air exiting from the apparatus.

Abstract: An air treatment apparatus, system and method for removal of health threatening airborne pollutants from an airflow is provided. The air treatment apparatus includes a ducting section having an inactivation zone created by either a plasma-generating flexible electrode alone, a UV light source alone, or a combination of a plasma-generating flexible electrode and a UV light source disposed within the interior of the ducting section, wherein the airflow and airborne pollutants are urged into the inactivation zone ensuring multiple exposures of airborne pollutant material into the inactivation zone resulting in purified air exiting from the apparatus.

Abstract: A flexible electrode assembly for an air treatment device comprising: a flexible dielectric layer forming an insulating sheet; a plurality of conductive tracks on a first side of the insulating sheet; a conductive layer on a second side of the insulating sheet; wherein supply of voltage to the conducting tracks and the conductive layer generates plasma which is discharged from the conducting tracks. In a further aspect, the present invention also provides an air treatment apparatus for removal of health threatening airborne pollutants, which may include pathogens, from an air flow, the air treatment apparatus comprising an apparatus having a generally cyclonic-shaped geometry comprising a cylindrical section and a conical section. The present invention also relates to an air treatment device comprising the flexible electrode assembly.

Abstract: A method for monitoring at least one process parameter of a plasma process being performed on a semiconductor wafer, surface or surface and determine arc events occurring within the plasma tool chamber. The method comprises the steps of detecting the modulated light being generated from the plasma sheath during the plasma process; sampling RF voltage and current signals from the RF transmission line; processing the detected modulated light and the RF signals to produce at least one monitor statistic for the plasma process, and process the monitor signal to determine the occurrence of arcing events during the wafer processing.

Abstract: A flexible electrode assembly for an air treatment device comprising: a flexible dielectric layer forming an insulating sheet; a plurality of conductive tracks on a first side of the insulating sheet; a conductive layer on a second side of the insulating sheet; wherein supply of voltage to the conducting tracks and the conductive layer generates plasma which is discharged from the conducting tracks. In a further aspect, the present invention also provides an air treatment apparatus for removal of health threatening airborne pollutants, which may include pathogens, from an air flow, the air treatment apparatus comprising an apparatus having a generally cyclonic-shaped geometry comprising a cylindrical section and a conical section. The present invention also relates to an air treatment device comprising the flexible electrode assembly.

Abstract: A method for monitoring at least one process parameter of a plasma process being performed on a semiconductor wafer, surface or surface and determine arc events occurring within the plasma tool chamber. The method comprises the steps of detecting the modulated light being generated from the plasma sheath during the plasma process; sampling RF voltage and current signals from the RF transmission line; processing the detected modulated light and the RF signals to produce at least one monitor statistic for the plasma process, and process the monitor signal to determine the occurrence of arcing events during the wafer processing.

Abstract: A coil assembly for generating plasma, is disclosed. The coil assembly includes a cylindrical coil having a cylindrical inner mesh, a cylindrical outer mesh and a cylindrical dielectric separating the inner and outer meshes, an insulating stand at each of the first and second end of the cylindrical coil configured for mounting the cylindrical coil in an elevated position, wherein supply of voltage to the inner and outer meshes generates plasma which is discharged from the outer mesh.

Abstract: An air treatment device having a plasma generator electrostatic precipitator assembly, is provided. The assembly includes an electrostatic precipitator configured to charge airborne particles in the vicinity of the electrostatic precipitator to provide charged airborne particles, and a plasma generator positioned in proximity to the electrostatic precipitator and configured for cooperation with the electrostatic precipitator. The plasma generator is configured to discharge plasma and provide an inactivation zone in the region of the plasma generator operable to inactivate airborne particles. The air treatment device directs the charged airborne particles generated by the electrostatic precipitator into the inactivation zone such that the air treatment device is adapted to generate charged airborne particles and then immediately, to direct the charged airborne particles into the inactivation zone so as to expose the charged airborne particles to plasma in the inactivation zone.

Abstract: An air treatment device having a plasma generator electrostatic precipitator assembly, is provided. The assembly includes an electrostatic precipitator configured to charge airborne particles in the vicinity of the electrostatic precipitator to provide charged airborne particles, and a plasma generator positioned in proximity to the electrostatic precipitator and configured for cooperation with the electrostatic precipitator. The plasma generator is configured to discharge plasma and provide an inactivation zone in the region of the plasma generator operable to inactivate airborne particles. The air treatment device includes means for directing the charged airborne particles generated by the electrostatic precipitator into the inactivation zone such that the air treatment device is adapted to generate charged airborne particles and then immediately, to direct the charged airborne particles into the inactivation zone so as to expose the charged airborne particles to plasma in the inactivation zone.

Abstract: A coil assembly for generating plasma, is disclosed. The coil assembly includes a cylindrical coil having a cylindrical inner mesh, a cylindrical outer mesh and a cylindrical dielectric separating the inner and outer meshes, an insulating stand at each of the first and second end of the cylindrical coil configured for mounting the cylindrical coil in an elevated position, wherein supply of voltage to the inner and outer meshes generates plasma which is discharged from the outer mesh.

Abstract: A coil assembly for generating plasma, is disclosed. The coil assembly includes a cylindrical coil having a cylindrical inner mesh, a cylindrical outer mesh and a cylindrical dielectric separating the inner and outer meshes, an insulating stand at each of the first and second end of the cylindrical coil configured for mounting the cylindrical coil in an elevated position, wherein supply of voltage to the inner and outer meshes generates plasma which is discharged from the outer mesh.

Abstract: An air treatment device having a plasma generator electrostatic precipitator assembly, is provided. The assembly includes an electrostatic precipitator configured to charge airborne particles in the vicinity of the electrostatic precipitator to provide charged airborne particles, and a plasma generator positioned in proximity to the electrostatic precipitator and configured for cooperation with the electrostatic precipitator. The plasma generator is configured to discharge plasma and provide an inactivation zone in the region of the plasma generator operable to inactivate airborne particles. The air treatment device includes means for directing the charged airborne particles generated by the electrostatic precipitator into the inactivation zone such that the air treatment device is adapted to generate charged airborne particles and then immediately, to direct the charged airborne particles into the inactivation zone so as to expose the charged airborne particles to plasma in the inactivation zone.

Abstract: A method and apparatus for sterilizing an article. The method comprises placing an article in a sterilization container, generating oxidizing plasma radicals at atmospheric pressure, and providing the oxidizing plasma radicals to the sterilization container to sterilize the article in the container.

Abstract: A method and apparatus for sterilising an article. The method comprises placing an article in a sterilisation container, generating oxidizing plasma radicals at atmospheric pressure, and providing the oxidizing plasma radicals to the sterilisation container to sterilise the article in the container.

Abstract: Method and apparatus for measuring process parameters of a plasma etch process. A method for detecting at least one process parameter of a plasma etch process being performed on a semiconductor wafer. The method comprises the steps of detecting light being generated from the plasma during the etch process, filtering the detected light to extract modulated light; and processing the detected modulated light to determine at least one process parameter of the etch process.