Abstract: A probe structure includes a monolithically integrated waveguide and lens. The probe is based on SU-8 as a guiding material. A waveguide mold is defined using wet etching of silicon using a silicon dioxide mask patterned with 45° angle with respect to the silicon substrate edge and an aluminum layer acting as a mirror is deposited on the silicon substrate. A lens mold is made using isotropic etching of the fused silica substrate and then aligned to the silicon substrate. A waveguide polymer such as SU-8 2025 is flowed into the waveguide mask+lens mold (both on the same substrate) by decreasing its viscosity and using capillary forces via careful temperature control of the substrate.

Abstract: A probe structure includes a monolithically integrated waveguide and lens. The probe is based on SU-8 as a guiding material. A waveguide mold is defined using wet etching of silicon using a silicon dioxide mask patterned with 45° angle with respect to the silicon substrate edge and an aluminum layer acting as a mirror is deposited on the silicon substrate. A lens mold is made using isotropic etching of the fused silica substrate and then aligned to the silicon substrate. A waveguide polymer such as SU-8 2025 is flowed into the waveguide mask+lens mold (both on the same substrate) by decreasing its viscosity and using capillary forces via careful temperature control of the substrate.

Abstract: A probe structure includes a monolithically integrated waveguide and lens. The probe is based on SU-8 as a guiding material. A waveguide mold is defined using wet etching of silicon using a silicon dioxide mask patterned with 45° angle with respect to the silicon substrate edge and an aluminum layer acting as a mirror is deposited on the silicon substrate. A lens mold is made using isotropic etching of the fused silica substrate and then aligned to the silicon substrate. A waveguide polymer such as SU-8 2025 is flowed into the waveguide mask+lens mold (both on the same substrate) by decreasing its viscosity and using capillary forces via careful temperature control of the substrate.

Abstract: Optical coupling designs are disclosed to provide a photonic device, for example, that includes a substrate; an optical waveguide formed on the substrate and configured as a multimode waveguide to support light in different optical waveguide modes; and an optical fiber structured as a multimode fiber to support light in different optical fiber modes, the optical fiber located above the optical waveguide and optically coupled to the optical waveguide via evanescent coupling to allow light to be coupled between the optical fiber and the optical waveguide.

Abstract: Optical coupling designs are disclosed to provide a photonic device, for example, that includes a substrate; an optical waveguide formed on the substrate and configured as a multimode waveguide to support light in different optical waveguide modes; and an optical fiber structured as a multimode fiber to support light in different optical fiber modes, the optical fiber located above the optical waveguide and optically coupled to the optical waveguide via evanescent coupling to allow light to be coupled between the optical fiber and the optical waveguide.

Abstract: A probe structure includes a monolithically integrated waveguide and lens. The probe is based on SU-8 as a guiding material. A waveguide mold is defined using wet etching of silicon using a silicon dioxide mask patterned with 45° angle with respect to the silicon substrate edge and an aluminum layer acting as a mirror is deposited on the silicon substrate. A lens mold is made using isotropic etching of the fused silica substrate and then aligned to the silicon substrate. A waveguide polymer such as SU-8 2025 is flowed into the waveguide mask+lens mold (both on the same substrate) by decreasing its viscosity and using capillary forces via careful temperature control of the substrate.

Abstract: Optical coupling designs are disclosed to provide a photonic device, for example, that includes a substrate; an optical waveguide formed on the substrate and configured as a multimode waveguide to support light in different optical waveguide modes; and an optical fiber structured as a multimode fiber to support light in different optical fiber modes, the optical fiber located above the optical waveguide and optically coupled to the optical waveguide via evanescent coupling to allow light to be coupled between the optical fiber and the optical waveguide.

Abstract: Optical coupling designs are disclosed to provide a photonic device, for example, that includes a substrate; an optical waveguide formed on the substrate and configured as a multimode waveguide to support light in different optical waveguide modes; and an optical fiber structured as a multimode fiber to support light in different optical fiber modes, the optical fiber located above the optical waveguide and optically coupled to the optical waveguide via evanescent coupling to allow light to be coupled between the optical fiber and the optical waveguide.