Patents by Inventor Felix-George Leu

Felix-George Leu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REMOTE PLASMA CLEANING METHOD AND APPARATUS FOR APPLYING SAID METHOD
    Publication number: 20110203610
    Abstract: A vacuum processing system with a vacuum chamber has an inlet, at least first and second outlets, exhaust means at a first of said outlets and a remote plasma source RPS, wherein the RPS is attached to a connecting point to the second of said outlets. In a method for remote plasma cleaning of a vacuum processing system with such an arrangement a flow of radicals is generated by said remote plasma source and directed to the first of said outlets whilst operating exhaust means via the second of said outlets.
    Type: Application
    Filed: July 7, 2009
    Publication date: August 25, 2011
    Applicant: OERLIKON SOLAR AG, TRUBBACH
    Inventors: Felix-George Leu, Christoph Ellert, Gerold Buchel, Javier Martin