Patents by Inventor Felix Wehrle

Felix Wehrle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030108409
    Abstract: The invention relates to a method for charging and discharging a process tank. The aim of the invention is to simplify the charging and discharging of a process tank with disc-shaped substrates. To this end, the disc-shaped substrates are picked-up during charging by a gripper that comprises at least two opposite gripper elements with receiving slots facing one another. The substrates are positioned above the process tank in such a manner that they are aligned with guide slots within the process tank. The gripper is lowered so as to partially lower the substrates into the process tank until they contact a lifted substrate lifting element inside the process tank. The gripper elements are then moved apart into a position in which the substrates are no longer held but are still guided in the receiving slots and they are further lowered into the process tank by lowering the lifting element.
    Type: Application
    Filed: November 7, 2002
    Publication date: June 12, 2003
    Inventors: Thomas Rodewaldt, Felix Wehrle
  • Patent number: 6269822
    Abstract: In a device for the wet treatment of substrates (3) in a container (1), containing a treatment fluid (2), whereby the substrates (3) are introduced into the container (1) with a substrate carrier (5), an optimal alignment and centering of the substrates (3) will result within the container (1) upon lifting from the container (1) with the aid of a substrate receiving device (4) provided within the container (1).
    Type: Grant
    Filed: March 22, 1999
    Date of Patent: August 7, 2001
    Assignee: Steag Microtech GmbH
    Inventors: Jurgen Funkhanel, Dieter Meister, Martin Weber, Felix Wehrle