Patents by Inventor Feng-Lung Hsieh

Feng-Lung Hsieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10910249
    Abstract: In an embodiment a system includes: a wafer store comprising a wafer configured for processing by a semiconductor processing tool; a cart configured to transport the wafer from the wafer store along a predetermined path; a robotic arm, the robotic arm configured to: read wafer data from the wafer store, transport the wafer from the wafer store to the cart, send the wafer data to the cart, wherein the cart is configured to transport the wafer to a location in response to the wafer data.
    Type: Grant
    Filed: November 12, 2018
    Date of Patent: February 2, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Feng-Lung Hsieh, Kuo-Hsiang Huang, Hung-Jen Lu
  • Publication number: 20190148198
    Abstract: In an embodiment a system includes: a wafer store comprising a wafer configured for processing by a semiconductor processing tool; a cart configured to transport the wafer from the wafer store along a predetermined path; a robotic arm, the robotic arm configured to: read wafer data from the wafer store, transport the wafer from the wafer store to the cart, send the wafer data to the cart, wherein the cart is configured to transport the wafer to a location in response to the wafer data.
    Type: Application
    Filed: November 12, 2018
    Publication date: May 16, 2019
    Inventors: Feng-Lung HSIEH, Kuo-Hsiang Huang, Hung-Jen Lu
  • Patent number: D451317
    Type: Grant
    Filed: December 6, 2000
    Date of Patent: December 4, 2001
    Inventor: Feng-Lung Hsieh
  • Patent number: D458479
    Type: Grant
    Filed: June 26, 2001
    Date of Patent: June 11, 2002
    Inventor: Feng-Lung Hsieh
  • Patent number: D463693
    Type: Grant
    Filed: June 26, 2001
    Date of Patent: October 1, 2002
    Inventor: Feng-Lung Hsieh
  • Patent number: D463926
    Type: Grant
    Filed: October 10, 2001
    Date of Patent: October 8, 2002
    Inventor: Feng-Lung Hsieh