Patents by Inventor Feng-Yeu Shau

Feng-Yeu Shau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6238279
    Abstract: A method and apparatus for filtering a slurry used in a chemical mechanical polishing apparatus is disclosed. Magnets are provided along the piping network between a slurry reservoir and the CMP apparatus. A magnet may also be placed adjacent to the slurry reservoir to prevent iron oxide particles from traveling with the slurry to the CMP apparatus. The magnets attract iron oxide particles from the slurry and remove those particles from the slurry prior to polishing. This reduces the amount of defects caused by the iron oxide particles in the slurry.
    Type: Grant
    Filed: June 3, 1999
    Date of Patent: May 29, 2001
    Assignees: ProMOS Technologies, Inc., Mosel Vitelic, Inc., Infineon Technologies AG
    Inventors: Feng-Yeu Shau, Rurng-Chien Chang, Champion Yi
  • Patent number: 6153116
    Abstract: A method of monitoring the state of chemical-mechanical polishing that can be applied to the polishing of a metallic layer over a substrate. The method includes performing a series of scanning operations while a wafer is being polished to generate multiple reflectance line spectra in each polishing period. The degree of dispersion of the reflectance spectra is then utilized as a polishing index. In this invention, the standard deviation of the reflectance spectra in each period is used as a monitoring index, and the peak value of the standard deviation is used to determine the polishing end point. Surface uniformity is monitored by using the time interval between two time nodes at half the peak standard deviation values. When the distance of separation between the two time nodes is large, it means that the polished surface is not sufficiently flat.
    Type: Grant
    Filed: October 30, 1998
    Date of Patent: November 28, 2000
    Assignee: United Microelectronics Corp.
    Inventors: Ming-Cheng Yang, Feng-Yeu Shau, Cheng-Sung Huang, Champion Yi