Abstract: A supercapacitor with both current collector and electrode based on transition metal nitride and the preparation method therefor is disclosed. First, the substrates were subjected to a standard cleaning technique to remove impurities and contaminations on the surface; then a layer of transition metal nitride film with high density and conductivity was deposited on the surface of substrates as a current collector to transport electrons. By simply adjusting the deposition process parameters, a rough and porous transition metal nitride film with high resistivity was grown directly on the current collector as active electrode material. In this invention, the transition metal nitrides were grown continuously as the current collector and then as the electrode materials, and the properties of these two materials can be tailored easily by changing the deposition process parameters.