Patents by Inventor Ferdinand Füller

Ferdinand Füller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for detecting a state of a deposition apparatus
    Patent number: 8980071
    Abstract: Apparatuses for deposition of one or more layers. In one aspect, an apparatus for deposition of one or more layers includes an anode; a cathode; a vacuum chamber including the anode and the cathode; a sensor configured to detect an electric potential between a section of the at least one anode and a section of the chamber. Furthermore, methods to monitor a device for deposition of one or more layers are also described.
    Type: Grant
    Filed: August 27, 2010
    Date of Patent: March 17, 2015
    Assignee: Applied Materials, Inc.
    Inventors: Guido Mahnke, Bernhard Stock, Markus Hanika, Ferdinand Füller
  • Apparatus and Method for Detecting a State of a Deposition Apparatus
    Publication number: 20120012455
    Abstract: Apparatuses for deposition of one or more layers. In one aspect, an apparatus for deposition of one or more layers includes an anode; a cathode; a vacuum chamber including the anode and the cathode; a sensor configured to detect an electric potential between a section of the at least one anode and a section of the chamber. Furthermore, methods to monitor a device for deposition of one or more layers are also described.
    Type: Application
    Filed: August 27, 2010
    Publication date: January 19, 2012
    Inventors: Guido Mahnke, Bernhard Stock, Markus Hanika, Ferdinand Füller