Abstract: A metrology tool includes a magnet to generate a magnetic field and a stage system to position a plurality of MRAM dies on an MRAM wafer in the magnetic field. The stage system includes a chuck on which to mount the MRAM wafer. The metrology tool further includes optics to provide a laser beam and direct the laser beam to be incident upon respective MRAM dies positioned in the magnetic field. The metrology tool additionally includes a detector to receive the laser beam as reflected by the respective MRAM dies and to measure rotation of the polarization of the reflected laser beam. The metrology tool is configurable to provide each MRAM die on the MRAM wafer with a common orientation with respect to the polarization of the laser beam.

Abstract: An automatic magneto-optic system includes a high field magnet controlled by a magnet control module, a non-contact magneto-optic measurement module, and an automated cassette-based disk transfer module. The magnet control module is constructed and arranged to apply a magnetic field of constant or a time-varying strength to a selected location of a magnetic disk. The non-contact magneto-optic measurement module includes a light source module and a measurement module. The automated cassette-based disk transfer module is constructed and arranged to position a selected location of a magnetic disc inside the magnet. The disk transfer module may include a multi-disk positioning module. The multi-disk positioning module may include one, two or more motors. The multi-disk positioning module may be constructed to determine angular displacement or rotation necessary for a second selected location to be inside the magnet to perform the magneto-optic measurement and constructed to attain the second selected position.

Abstract: A magnetic property measuring system includes coil structures configured to apply a magnetic field to a sample, a light source configured to irradiate incident light to the sample, and a detector configured to detect polarization of light reflected from the sample. The magnetic field is perpendicular to a surface of the sample. Each coil structure includes a pole piece and a coil surrounding an outer circumferential surface of the pole piece. A wavelength of the incident light is equal to or less than about 580 nm.