Patents by Inventor Ferris Liu

Ferris Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Highly sensitive defect detection method
    Patent number: 7362428
    Abstract: A highly sensitive defect detection method is disclosed. A medium with a refractive index greater than 1 is formed on a sample. As a result, incident light projected by a defect detecting system attenuates less when reaching the bottom defects. The detection sensitivity of the defect detecting system is enhanced accordingly.
    Type: Grant
    Filed: May 5, 2005
    Date of Patent: April 22, 2008
    Assignee: Promos Technologies Inc.
    Inventors: Chung-I Chang, Ferris Liu
  • Highly sensitive defect detection method
    Publication number: 20060187446
    Abstract: A highly sensitive defect detection method is disclosed. A medium with a refractive index greater than 1 is formed on a sample. As a result, incident light projected by a defect detecting system attenuates less when reaching the bottom defects. The detection sensitivity of the defect detecting system is enhanced accordingly.
    Type: Application
    Filed: May 5, 2005
    Publication date: August 24, 2006
    Inventors: Chung-I Chang, Ferris Liu