Patents by Inventor FHM-Faridur Rahman

FHM-Faridur Rahman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam system and method of operating a charged particle beam system
    Patent number: 9640364
    Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: May 2, 2017
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
  • Charged particle beam system and method of operating a charged particle beam system
    Patent number: 9627172
    Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: April 18, 2017
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
  • Charged particle beam system and method of operating a charged particle beam system
    Patent number: 9536699
    Abstract: The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: January 3, 2017
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Weijie Huang, Raymond Hill, FHM-Faridur Rahman, Alexander Groholski, Shawn McVey
  • Charged Particle Beam System and Method of Operating a Charged Particle Beam System
    Publication number: 20160111243
    Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
    Type: Application
    Filed: December 15, 2015
    Publication date: April 21, 2016
    Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
  • Charged Particle Beam System and Method of Operating a Charged Particle Beam System
    Publication number: 20160104598
    Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.
    Type: Application
    Filed: December 15, 2015
    Publication date: April 14, 2016
    Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
  • Charged particle beam system and method of operating a charged particle beam system
    Patent number: 9218934
    Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: December 22, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
  • Charged particle beam system and method of operating a charged particle beam system
    Patent number: 9218935
    Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: December 22, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
  • Charged Particle Beam System and Method of Operating a Charged Particle Beam System
    Publication number: 20150008333
    Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
    Type: Application
    Filed: June 25, 2014
    Publication date: January 8, 2015
    Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
  • CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM
    Publication number: 20150008334
    Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.
    Type: Application
    Filed: June 25, 2014
    Publication date: January 8, 2015
    Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
  • CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM
    Publication number: 20150008332
    Abstract: The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
    Type: Application
    Filed: June 25, 2014
    Publication date: January 8, 2015
    Inventors: John A. Notte, IV, Weijie Huang, Raymond Hill, FHM-Faridur Rahman, Alexander Groholski, Shawn McVey
  • Ion beam stabilization
    Patent number: 8563954
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: October 22, 2013
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • ION BEAM STABILIZATION
    Publication number: 20120097849
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Application
    Filed: December 23, 2011
    Publication date: April 26, 2012
    Applicant: CARL ZEISS NTS, LLC
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • Ion beam stabilization
    Patent number: 8093563
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Grant
    Filed: August 27, 2009
    Date of Patent: January 10, 2012
    Assignee: Carl Zeiss NTS, LLC
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • ION BEAM STABILIZATION
    Publication number: 20100051805
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Application
    Filed: August 27, 2009
    Publication date: March 4, 2010
    Applicant: CARL ZEISS SMT INC.
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV