Patents by Inventor Fimitomo Kawahara

Fimitomo Kawahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for production of substrate electrode for plasma processing
    Patent number: 8291581
    Abstract: A plurality of reference holes are formed in the surface of a first substrate made of a first material, and a plurality of columnar members are each fitted in the reference holes in such a manner that at least a part of each of the columnar members projects from the surface of the first substrate. Subsequently, an electrode surface layer made of a second material is formed on the surface of the first substrate in such a manner that an end portion of each of the columnar members are exposed at the surface and then the columnar members are removed. Thus obtained is a substrate-like electrode including at least an electrode surface layer provided with through holes having a cross section matching a sectional shape of the projecting portion of the columnar members.
    Type: Grant
    Filed: May 30, 2008
    Date of Patent: October 23, 2012
    Assignees: Mitsui Engineering & Shipbuilding Co., Ltd., ADMAP, Inc.
    Inventor: Fimitomo Kawahara