Patents by Inventor Flavien Hirigoyen

Flavien Hirigoyen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10388686
    Abstract: A image sensor includes a semiconductor substrate with a photosensitive region. Metallization layers are stacked over the semiconductor substrate. Each metallization layer includes an etch stop layer and a dielectric layer on the etch stop layer. At least one metallization layer includes one or more microlenses positioned over the photosensitive region. The one or more microlenses are integrally formed by the etch stop layer.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: August 20, 2019
    Assignee: STMicroelectronics (Grenoble 2) SAS
    Inventor: Flavien Hirigoyen
  • Publication number: 20180145103
    Abstract: A image sensor includes a semiconductor substrate with a photosensitive region. Metallization layers are stacked over the semiconductor substrate. Each metallization layer includes an etch stop layer and a dielectric layer on the etch stop layer. At least one metallization layer includes one or more microlenses positioned over the photosensitive region. The one or more microlenses are integrally formed by the etch stop layer.
    Type: Application
    Filed: November 21, 2016
    Publication date: May 24, 2018
    Applicant: STMicroelectronics (Grenoble 2) SAS
    Inventor: Flavien Hirigoyen
  • Patent number: 9865636
    Abstract: A method of simultaneously manufacturing First and second pixels respectively shielded on a first and on a second side are simultaneously manufactured using a process wherein a first insulator is deposited on an active area. A first metal level is deposited and defined, with a first mask, to form a shield on the first side of the first pixel and on the second side of the second pixel, and a line opposite to the shield. A second insulator is deposited, and via openings therein are defined, with a second mask. An overlying second metal level is deposited and defined, with a third mask, to form two connection areas covering the via openings on each side of the first and second pixels. The second and third masks are identical for the first and second pixels.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: January 9, 2018
    Assignee: STMicroelectronics (Grenoble 2) SAS
    Inventors: Flavien Hirigoyen, Emilie Huss
  • Patent number: 9728659
    Abstract: A Single-Photon Avalanche Diode (SPAD) device an active region configured to detect incident radiation, a first radiation blocking ring surrounding the active region, and a radiation blocking cover configured to shield part of the active region from the incident radiation. The radiation blocking cover is configured to define a second radiation blocking ring vertically spaced apart from the first radiation blocking ring. The SPAD device may include radiation blocking vias extending between the first and second radiation blocking rings.
    Type: Grant
    Filed: September 30, 2015
    Date of Patent: August 8, 2017
    Assignees: STMICROELECTRONICS (RESEARCH & DEVELOPMENT) LIMITED, STMICROELECTRONICS (GRENOBLE 2) SAS
    Inventors: Flavien Hirigoyen, Bruce Rae, Gaelle Palmigiani, Stuart McLeod
  • Patent number: 9595552
    Abstract: A method of simultaneously manufacturing First and second pixels respectively shielded on a first and on a second side are simultaneously manufactured using a process wherein a first insulator is deposited on an active area. A first metal level is deposited and defined, with a first mask, to form a shield on the first side of the first pixel and on the second side of the second pixel, and a line opposite to the shield. A second insulator is deposited, and via openings therein are defined, with a second mask. An overlying second metal level is deposited and defined, with a third mask, to form two connection areas covering the via openings on each side of the first and second pixels. The second and third masks are identical for the first and second pixels.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: March 14, 2017
    Assignee: STMICROELECTRONICS (GRENOBLE 2) SAS
    Inventors: Flavien Hirigoyen, Emilie Huss
  • Publication number: 20170033151
    Abstract: A method of simultaneously manufacturing First and second pixels respectively shielded on a first and on a second side are simultaneously manufactured using a process wherein a first insulator is deposited on an active area. A first metal level is deposited and defined, with a first mask, to form a shield on the first side of the first pixel and on the second side of the second pixel, and a line opposite to the shield. A second insulator is deposited, and via openings therein are defined, with a second mask. An overlying second metal level is deposited and defined, with a third mask, to form two connection areas covering the via openings on each side of the first and second pixels. The second and third masks are identical for the first and second pixels.
    Type: Application
    Filed: October 11, 2016
    Publication date: February 2, 2017
    Applicant: STMicroelectronics (Grenoble 2) SAS
    Inventors: Flavien Hirigoyen, Emilie Huss
  • Patent number: 9521304
    Abstract: An image sensor pixel may include an array of four photosites, a transverse isolator wall separating the array in two rows of two photosites, and a longitudinal isolator wall separating the array in two columns of two photosites. Both ends of the longitudinal wall may be set back relative to the edges of the array. First and second conversion nodes may be arranged in the spaces between the longitudinal wall and the edges of the matrix. Each conversion node may be common to two adjacent photosites, and an independent transfer gate may be between each photosite and the corresponding conversion node.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: December 13, 2016
    Assignee: STMICROELECTRONICS (GRENOBLE 2) SAS
    Inventors: Flavien Hirigoyen, Emilie Huss
  • Publication number: 20160182780
    Abstract: An image sensor pixel may include an array of four photosites, a transverse isolator wall separating the array in two rows of two photosites, and a longitudinal isolator wall separating the array in two columns of two photosites. Both ends of the longitudinal wall may be set back relative to the edges of the array. First and second conversion nodes may be arranged in the spaces between the longitudinal wall and the edges of the matrix. Each conversion node may be common to two adjacent photosites, and an independent transfer gate may be between each photosite and the corresponding conversion node.
    Type: Application
    Filed: August 28, 2015
    Publication date: June 23, 2016
    Inventors: Flavien Hirigoyen, Emilie Huss
  • Patent number: 9299733
    Abstract: An image sensor is formed by a pixel array including a plurality of pixels. Certain ones of the pixels include, above their active areas, a first optical grating formed of periodically spaced apart parallel strips separated from the active area by a first insulator. Those pixels further include, in another metal level, a second optical grating formed of periodically spaced apart parallel strips separated from the first grating by a second insulator. The second optical grating is laterally shifted with respect to the first grating in a direction orthogonal to a longitudinal direction of the parallel strips.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: March 29, 2016
    Assignee: STMicroelectronics (Grenoble 2) SAS
    Inventor: Flavien Hirigoyen
  • Publication number: 20160064579
    Abstract: A Single-Photon Avalanche Diode (SPAD) device an active region configured to detect incident radiation, a first radiation blocking ring surrounding the active region, and a radiation blocking cover configured to shield part of the active region from the incident radiation. The radiation blocking cover is configured to define a second radiation blocking ring vertically spaced apart from the first radiation blocking ring. The SPAD device may include radiation blocking vias extending between the first and second radiation blocking rings.
    Type: Application
    Filed: September 30, 2015
    Publication date: March 3, 2016
    Inventors: Flavien HIRIGOYEN, Bruce RAE, Gaelle PALMIGIANI, Stuart MCLEOD
  • Publication number: 20150349010
    Abstract: An image sensor is formed by a pixel array including a plurality of pixels. Certain ones of the pixels include, above their active areas, a first optical grating formed of periodically spaced apart parallel strips separated from the active area by a first insulator. Those pixels further include, in another metal level, a second optical grating formed of periodically spaced apart parallel strips separated from the first grating by a second insulator. The second optical grating is laterally shifted with respect to the first grating in a direction orthogonal to a longitudinal direction of the parallel strips.
    Type: Application
    Filed: March 17, 2015
    Publication date: December 3, 2015
    Applicant: STMicroelectronics (Grenoble 2) SAS
    Inventor: Flavien Hirigoyen
  • Publication number: 20150295003
    Abstract: A method of simultaneously manufacturing First and second pixels respectively shielded on a first and on a second side are simultaneously manufactured using a process wherein a first insulator is deposited on an active area. A first metal level is deposited and defined, with a first mask, to form a shield on the first side of the first pixel and on the second side of the second pixel, and a line opposite to the shield. A second insulator is deposited, and via openings therein are defined, with a second mask. An overlying second metal level is deposited and defined, with a third mask, to form two connection areas covering the via openings on each side of the first and second pixels. The second and third masks are identical for the first and second pixels.
    Type: Application
    Filed: March 9, 2015
    Publication date: October 15, 2015
    Applicant: STMICROELECTRONICS (GRENOBLE 2) SAS
    Inventors: Flavien Hirigoyen, Emilie Huss
  • Patent number: 9099580
    Abstract: An elementary image acquisition or display device, including a focusing structure with microlenses, each microlens being shaped to focus incident light beams towards a substrate while avoiding intermediate conductive tracks and vias.
    Type: Grant
    Filed: April 18, 2012
    Date of Patent: August 4, 2015
    Assignee: STMicroelectronics S.A.
    Inventors: Flavien Hirigoyen, Axel Crocherie
  • Patent number: 9052560
    Abstract: A nanoprojector panel formed of an array of cells, each cell including a liquid crystal layer between upper and lower transparent electrodes, a MOS control transistor being arranged above the upper electrode, each transistor being covered with at least three metallization levels. The transistor of each cell extends in a corner of the cell so that the transistors of an assembly of four adjacent cells are arranged in a central region of the assembly. The upper metallization level extends above the transistors of each the assembly of four adjacent cells. The panel includes, for each assembly of four adjacent cells, a first conductive ring surrounding the transistors, the first ring extending from the lower metallization level to the upper electrode of each cell, with an interposed insulating material.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: June 9, 2015
    Assignees: STMicroelectronics SA, Commisariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Michel Marty, Flavien Hirigoyen, Josep Segura Puchades, Hélène Wehbe-Alause, Umberto Rossini
  • Patent number: 8674283
    Abstract: A method of fabricating an image sensor includes the steps of: forming at least two photosites in a semiconductor substrate; forming a trench between the photosites; forming a thin liner on at least the sidewalls of the trench; depositing a conductive material having a first refractive index in the trench; and forming a region surrounded by the conductive material and having a second refractive index lower than the first index of refraction within the conductive material in the trench.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: March 18, 2014
    Assignees: STMicroelectronics (Crolles 2) SAS, STMicroelectronics SA
    Inventors: Francois Roy, Flavien Hirigoyen, Julien Michelot
  • Patent number: 8664578
    Abstract: An image sensor having a semiconductor substrate, at least two photosites in the substrate and an isolation region between the photosites. The isolation region has a first trench covered by a thin electrically insulating liner and filled with an electrically conductive material, the conductive material has a second trench at least partially filled with an optically isolating material.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: March 4, 2014
    Assignee: STMicroelectronics SA
    Inventors: Flavien Hirigoyen, Julien Michelot
  • Publication number: 20130335666
    Abstract: A nanoprojector panel formed of an array of cells, each cell including a liquid crystal layer between upper and lower transparent electrodes, a MOS control transistor being arranged above the upper electrode, each transistor being covered with at least three metallization levels. The transistor of each cell extends in a corner of the cell so that the transistors of an assembly of four adjacent cells are arranged in a central region of the assembly. The upper metallization level extends above the transistors of each the assembly of four adjacent cells. The panel includes, for each assembly of four adjacent cells, a first conductive ring surrounding the transistors, the first ring extending from the lower metallization level to the upper electrode of each cell, with an interposed insulating material.
    Type: Application
    Filed: June 18, 2013
    Publication date: December 19, 2013
    Inventors: Michel Marty, Flavien Hirigoyen, Josep Segura Puchades, Hélène Wehbe-Alause, Umberto Rossini
  • Publication number: 20120262635
    Abstract: An elementary image acquisition or display device, including a focusing structure with microlenses, each microlens being shaped to focus incident light beams towards a substrate while avoiding intermediate conductive tracks and vias.
    Type: Application
    Filed: April 18, 2012
    Publication date: October 18, 2012
    Applicant: STMicroelectronics S.A.
    Inventors: Flavien Hirigoyen, Axel Crocherie
  • Publication number: 20120153128
    Abstract: A method of fabricating an image sensor includes the steps of: forming at least two photosites in a semiconductor substrate; forming a trench between the photosites; forming a thin liner on at least the sidewalls of the trench; depositing a conductive material having a first refractive index in the trench; and forming a region surrounded by the conductive material and having a second refractive index lower than the first index of refraction within the conductive material in the trench.
    Type: Application
    Filed: December 21, 2011
    Publication date: June 21, 2012
    Applicants: STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Francois Roy, Flavien Hirigoyen, Julien Michelot
  • Publication number: 20120153127
    Abstract: An image sensor having a semiconductor substrate, at least two photosites in the substrate and an isolation region between the photosites. The isolation region has a first trench covered by a thin electrically insulating liner and filled with an electrically conductive material, the conductive material has a second trench at least partially filled with an optically isolating material.
    Type: Application
    Filed: December 21, 2011
    Publication date: June 21, 2012
    Applicant: STMICROELECTRONICS SA
    Inventors: Flavien Hirigoyen, Julien Michelot