Patents by Inventor Flip de Jong

Flip de Jong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PHOTORESIST INSPECTION APPARATUS, PHOTORESIST INSPECTION METHOD USING THE SAME, AND ELECTRON BEAM EXPOSURE APPARATUS
    Publication number: 20230042743
    Abstract: According to example embodiments, there is provided a photoresist inspection method. The photoresist inspection method includes: providing a photoresist on a substrate; irradiating the photoresist with an electron beam and an excitation beam; detecting fluorescent light generated by the photoresist in response to the excitation beam; and evaluating the photoresist based on the fluorescent light.
    Type: Application
    Filed: February 24, 2022
    Publication date: February 9, 2023
    Applicant: Katholieke Universiteit Leuven
    Inventors: Sukjong Bae, Johan Hofkens, Haifeng Yuan, Flip de Jong