Abstract: An arrangement (100), a method and a computer program product for system-integrated calibration of facet mirrors (18, 19) of a microlithographic illumination system (20). Beam paths (103) between a radiation source (101) and a radiation detector (102) are created by the facet mirrors (18, 19), with respectively only one pivotable micromirror (18?, 19?) of each facet mirror (18, 19) affecting said beam path. By methodically pivoting one of the micromirrors (18?, 19?) affecting the beam path (10), it is possible, based on the radiation detector (102), to find a specific optimal pivot position, the underlying orientation of the micromirror (18?, 19?) of which can also be calculated geometrically. By comparing the calculated orientation with the orientation ascertained by a tilt sensor on the micromirror (18?, 19?), it is possible to calibrate the tilt sensor or micromirror (18?, 19?) of the facet mirror (18, 19).

Abstract: A metrology system includes a first beam analysis system for analyzing at least one first measurement beam that was coupled from the excitation laser beam before a reflection on the target material and a second beam analysis system for analyzing at least one second measurement beam that was coupled from the excitation laser beam after a reflection on the target material. Each of the first beam analysis system and the second beam analysis system has at least one wavefront sensor system.

Abstract: An apparatus includes a light intensity sensor arrangement, a focusing unit for focusing the light beam at a specified location on the light intensity sensor arrangement, and an adjustment unit which adjusts a relative position of the intensity centroid of the light beam in relation to a specified location on the light intensity sensor arrangement when there is a change in the beam angle present upon entry in the apparatus. The adjustment unit is configured to keep the relative position of the intensity centroid of the light beam in relation to the specified location on the light intensity sensor arrangement constant up to a specified maximum deviation. The maximum deviation corresponds to half the mean beam diameter upon incidence on the light intensity sensor arrangement.

Abstract: Sensor component with a magnetic field sensor (2) for co-operating with at least one magnet (24, 26) and with a component structure (3), where the magnetic field sensor (2) is arranged on and/or in the component structure (3). In order to reduce the manufacturing cost and/or the assembly effort and/or to be able in a simple manner to position the magnetic field sensor (2) as close as possible to the at least one magnet (24, 26), the sensor component (1) is characterized in that the component structure (3) is in the form of a screw for producing a screw connection (15).

Abstract: When replacing a mirror in a projection exposure apparatus, a mirror for replacement is initially removed (41). Position- and orientation data of the removed mirror for replacement are measured (43) by a position -and orientation data measuring device. Furthermore, position- and orientation data of a replacement mirror, to be inserted in place of the mirror for replacement, are measured (46) using the position- and orientation data measuring device. Bearing points of the replacement mirror are reworked (48) on the basis of ascertained differences between, firstly, the position- and orientation data of the mirror for replacement and, secondly, the position- and orientation data of the replacement mirror. The reworked replacement mirror is installed (54). This yields a mirror replacement method, in which an adjustment outlay of the replacement mirror in the projection exposure apparatus is reduced.

Abstract: An arrangement of an angle measurement device on the chassis of a vehicle. The chassis includes a control arm (1) and a pivot bearing (2) with a pivot axis. The control arm (1) pivots about the pivot axis and the angle measurement device has a sensor (3) and a signal emitter. The sensor (3) is arranged on the control arm (1), in the area of the pivot axis, and the signal emitter is arranged on the pivot bearing (2).

Abstract: A ball joint (1), for a vehicle chassis, having a joint housing (3) and a joint body (4) having a spherical portion (5). The joint body (4) is held by the joint housing (3) at the spherical portion (5) of the joint body such that the joint body is mounted for articulation movement relative to the joint housing. A sensor assembly comprises a first sensor element (6) associated with the joint housing (4) and a second sensor element (7) associated with the joint body (4). The second sensor element interacts with the first sensor element (6) in order to sense the position of the joint body (4) relative to the joint housing (3). The ball joint is characterized in that the second sensor element (7) is arranged in the region of the spherical portion (5) of the joint body (4).

Abstract: An arrangement for connecting a link (1) of a chassis to a wheel carrier (2) by way of a ball sleeve joint (3). The link (1) has an link eye (1a), the ball sleeve joint (3) has a ball sleeve (7), and the wheel carrier (2) has two bearing eyes (4, 5). A sensor is located on the link eye (1a) and a signal generator is located on the ball sleeve (7). The sensor and signal generator form an angle measuring device. The ball sleeve (7) is connected to the bearing eyes (4, 5) via a threaded pin (6). An anti-rotation unit (9, 10) is provided between the ball sleeve (7) and the wheel carrier (2) in order to fix a defined angular position of the ball sleeve (7) with respect to the wheel carrier (2).

Abstract: When replacing a mirror in a projection exposure apparatus, a mirror for replacement is initially removed (41). Position- and orientation data of the removed mirror for replacement are measured (43) by a position-and orientation data measuring device. Furthermore, position- and orientation data of a replacement mirror, to be inserted in place of the mirror for replacement, are measured (46) using the position- and orientation data measuring device. Bearing points of the replacement mirror are reworked (48) on the basis of ascertained differences between, firstly, the position- and orientation data of the mirror for replacement and, secondly, the position- and orientation data of the replacement mirror. The reworked replacement mirror is installed (54). This yields a mirror replacement method, in which an adjustment outlay of the replacement mirror in the projection exposure apparatus is reduced.

Abstract: An apparatus includes a light intensity sensor arrangement, a focusing unit for focusing the light beam at a specified location on the light intensity sensor arrangement, and an adjustment unit which adjusts a relative position of the intensity centroid of the light beam in relation to a specified location on the light intensity sensor arrangement when there is a change in the beam angle present upon entry in the apparatus. The adjustment unit is configured to keep the relative position of the intensity centroid of the light beam in relation to the specified location on the light intensity sensor arrangement constant up to a specified maximum deviation. The maximum deviation corresponds to half the mean beam diameter upon incidence on the light intensity sensor arrangement.

Abstract: A method for restoring an illumination system installed in an EUV apparatus is provided.

Abstract: A metrology system includes a first beam analysis system for analyzing at least one first measurement beam that was coupled from the excitation laser beam before a reflection on the target material and a second beam analysis system for analyzing at least one second measurement beam that was coupled from the excitation laser beam after a reflection on the target material. Each of the first beam analysis system and the second beam analysis system has at least one wavefront sensor system.

Abstract: A method for restoring an illumination system installed in an EUV apparatus is provided.

Abstract: A ball joint (1), for a vehicle chassis, having a joint housing (3) and a joint body (4) having a spherical portion (5). The joint body (4) is held by the joint housing (3) at the spherical portion (5) of the joint body such that the joint body is mounted for articulation movement relative to the joint housing. A sensor assembly comprises a first sensor element (6) associated with the joint housing (4) and a second sensor element (7) associated with the joint body (4). The second sensor element interacts with the first sensor element (6) in order to sense the position of the joint body (4) relative to the joint housing (3). The ball joint is characterized in that the second sensor element (7) is arranged in the region of the spherical portion (5) of the joint body (4).

Abstract: An arrangement of an angle measurement device on the chassis of a vehicle. The chassis includes a control arm (1) and a pivot bearing (2) with a pivot axis. The control arm (1) pivots about the pivot axis and the angle measurement device has a sensor (3) and a signal emitter. The sensor (3) is arranged on the control arm (1), in the area of the pivot axis, and the signal emitter is arranged on the pivot bearing (2).

Abstract: An arrangement for connecting a link (1) of a chassis to a wheel carrier (2) by way of a ball sleeve joint (3). The link (1) has an link eye (1a), the ball sleeve joint (3) has a ball sleeve (7), and the wheel carrier (2) has two bearing eyes (4, 5). A sensor is located on the link eye (1a) and a signal generator is located on the ball sleeve (7). The sensor and signal generator form an angle measuring device. The ball sleeve (7) is connected to the bearing eyes (4, 5) via a threaded pin (6). An anti-rotation unit (9, 10) is provided between the ball sleeve (7) and the wheel carrier (2) in order to fix a defined angular position of the ball sleeve (7) with respect to the wheel carrier (2).

Abstract: A system and a method for analyzing a light beam guided by a beam guiding optical unit. The system has a graduated neutral density filter arrangement (120, 520), which is arranged in a far field plane of the beam guiding optical unit and has at least one graduated neutral density filter (121, 521, 522, 523) having a spatially varying transmission, and a light intensity sensor arrangement having at least one light intensity sensor (140, 540), which is arranged in a near field plane of the beam guiding optical unit and is configured to measure (141, 541, 542, 543), for each graduated neutral density filter (121, 521, 522, 523) of the graduated neutral density filter arrangement (120, 520), a light intensity transmitted by each graduated neutral density filter.

Abstract: A system and a method for analyzing a light beam guided by a beam guiding optical unit. The system has a graduated neutral density filter arrangement (120, 520), which is arranged in a far field plane of the beam guiding optical unit and has at least one graduated neutral density filter (121, 521, 522, 523) having a spatially varying transmission, and a light intensity sensor arrangement having at least one light intensity sensor (140, 540), which is arranged in a near field plane of the beam guiding optical unit and is configured to measure (141, 541, 542, 543), for each graduated neutral density filter (121, 521, 522, 523) of the graduated neutral density filter arrangement (120, 520), a light intensity transmitted by each graduated neutral density filter.