Abstract: The present disclosure relates to differential pressure transducers. The teachings thereof may be embodied in diaphragm-beam configurations for measuring small values of differential pressure and/or a bridge circuit for converting mechanical strains into an electric output signal. For example, a diaphragm-beam structure for measuring differential pressure may include: a frame; a paddle; a resilient beam member; a diaphragm; and a gap defined between the paddle and the frame. The diaphragm flexes under pressure on one surface. The resilient beam member anchors the paddle to the frame. The second surface of the diaphragm is mounted to the first surface of the paddle and the frame to bridge the gap. The paddle moves due to flexure of the diaphragm. The resilient beam member bends due to movement of the paddle. The thickness of the diaphragm is less than 50 micrometers.

Abstract: The present disclosure relates to differential pressure transducers. The teachings thereof may be embodied in diaphragm-beam configurations for measuring small values of differential pressure and/or a bridge circuit for converting mechanical strains into an electric output signal. For example, a diaphragm-beam structure for measuring differential pressure may include: a frame; a paddle; a resilient beam member; a diaphragm; and a gap defined between the paddle and the frame. The diaphragm flexes under pressure on one surface. The resilient beam member anchors the paddle to the frame. The second surface of the diaphragm is mounted to the first surface of the paddle and the frame to bridge the gap. The paddle moves due to flexure of the diaphragm. The resilient beam member bends due to movement of the paddle. The thickness of the diaphragm is less than 50 micrometers.