Patents by Inventor Florian Demski

Florian Demski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250362321
    Abstract: The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
    Type: Application
    Filed: August 8, 2025
    Publication date: November 27, 2025
    Inventors: Christof Baur, Florian Demski
  • Patent number: 12405289
    Abstract: The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
    Type: Grant
    Filed: March 26, 2024
    Date of Patent: September 2, 2025
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Christof Baur, Florian Demski
  • Publication number: 20240230709
    Abstract: The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
    Type: Application
    Filed: March 26, 2024
    Publication date: July 11, 2024
    Inventors: Christof Baur, Florian Demski
  • Patent number: 11965910
    Abstract: The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
    Type: Grant
    Filed: March 30, 2023
    Date of Patent: April 23, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Christof Baur, Florian Demski
  • Publication number: 20230251285
    Abstract: The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
    Type: Application
    Filed: March 30, 2023
    Publication date: August 10, 2023
    Inventors: Christof Baur, Florian Demski
  • Patent number: 11630124
    Abstract: The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: April 18, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Christof Baur, Florian Demski
  • Publication number: 20220082583
    Abstract: The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.
    Type: Application
    Filed: August 12, 2021
    Publication date: March 17, 2022
    Inventors: Christof Baur, Florian Demski