Patents by Inventor Florian Doll

Florian Doll has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical beam deflecting element, illumination system including same, and related method
    Patent number: 9025131
    Abstract: An optical beam deflecting element may be used effectively as an energy distribution manipulator in an illumination system to vary the energy distribution within a given spatial intensity distribution in a pupil plane of the illumination system substantially without changing the shape and size and position of illuminated areas in the pupil plane.
    Type: Grant
    Filed: January 25, 2012
    Date of Patent: May 5, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Daniel Runde, Florian Doll, Reinhard Voelkel, Kenneth Weible, Gundula Weiss, Michael Gerhard
  • OPTICAL BEAM DEFLECTING ELEMENT, ILLUMINATION SYSTEM INCLUDING SAME, AND RELATED METHOD
    Publication number: 20120249988
    Abstract: An optical beam deflecting element may be used effectively as an energy distribution manipulator in an illumination system to vary the energy distribution within a given spatial intensity distribution in a pupil plane of the illumination system substantially without changing the shape and size and position of illuminated areas in the pupil plane.
    Type: Application
    Filed: January 25, 2012
    Publication date: October 4, 2012
    Applicant: CARL ZEISS SMT GMBH
    Inventors: Daniel Runde, Florian Doll, Reinhard Voelkel, Kenneth Weible, Gundula Weiss, Michael Gerhard