Abstract: Disclosed is a vacuum valve for gas-tight closing of a valve opening defining an opening axis for a vacuum transport system including a transport tube having a plurality of transport tube segments. The vacuum valve further includes a sealing surface surrounding the valve opening, a closure component having a circumferentially closed integral seal, and a drive unit to open and close the closure component. The seal contacts the sealing surface in a closed position. The closure axis is perpendicular to the opening axis, wherein the progressions of the sealing surface and the seal each have a first and a second main section as well as two side sections, the two main sections lie in planes which are at right angles to the opening axis and are spaced apart from one another, and are connected at two opposite main section sides in each case by one of the side sections.

Abstract: A regulating vacuum valve has a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Abstract: Disclosed is a regulating vacuum valve having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Abstract: A closure device for closing an opening in a wall in a vacuum-tight manner has a valve plate, which by way of a connecting device is connected to a valve rod, for closing and exposing the opening. The connecting device has a swivel head of which at least portions of the external surface are of a spherical configuration and which is disposed in a receptacle space of a joint body. For blocking a rotation of the swivel head about the longitudinal axis of the valve rod, at least one projecting stud, that is disposed on the swivel head or joint body, protrudes into an assigned groove which is disposed in the other one of these two parts and which in a central position of the connecting device extends in a plane that lies parallel to the longitudinal axis of the valve rod.

Abstract: A safeguarding device includes one or more positive-fit units that safeguard a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism. The closing mechanism includes one or more chambers, which includes a pressure connection channel that allows a variation of an inner pressure in the chamber relative to a reference pressure. A differential pressure is calculated from the inner pressure of the chamber and the reference pressure and influences a safeguarding status of the positive-fit unit.

Abstract: A closure device for closing an opening in a wall in a vacuum-tight manner has a valve plate, which by way of a connecting device is connected to a valve rod, for closing and exposing the opening. The connecting device has a swivel head of which at least portions of the external surface are of a spherical configuration and which is disposed in a receptacle space of a joint body. For blocking a rotation of the swivel head about the longitudinal axis of the valve rod, at least one projecting stud, that is disposed on the swivel head or joint body, protrudes into an assigned groove which is disposed in the other one of these two parts and which in a central position of the connecting device extends in a plane that lies parallel to the longitudinal axis of the valve rod.

Abstract: A valve for closing and opening a valve opening in a gas-tight manner and for ventilating a vacuum volume is disclosed. The valve includes a valve seat, a closure element and an adjusting unit, which is arranged to provide a movement of the closure element relative to the valve seat in such a way that the closure element is adjustable from an open position to a closed position and back again. The valve seat, the closure element and the adjusting unit are arranged in such a way that the closure element can be adjusted linearly along an opening axis. The valve comprises a holding device arranged to hold the closure element in the closed position by providing a holding force.

Abstract: A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Abstract: The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the g

Abstract: An arrangement with a valve having a valve housing and a closure member mounted for movement in an interior space of the valve housing between a closed position and an open position by a valve drive. The closure member closes valve housing openings in the closed position and opens them in the open position. The arrangement has an attachment part with an attachment part housing and a push tube, and the push tube is mounted displaceably in the attachment part housing. The attachment part housing and the push tube together enclose a line cavity of the attachment part for conducting a fluid through the attachment part. The attachment part housing is fastened on the outside to the valve housing, and the push tube can be pushed through the interior space of the valve housing when the closure member is in the open position.

Abstract: A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Abstract: An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: Disclosed is a regulating vacuum having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Abstract: A safeguarding device, in particular a safeguarding device for a wafer transport container includes at least one positive-fit unit configured at least for a safeguarding of a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism.

Abstract: A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Abstract: Vacuum valve having a valve housing with first and second valve openings, and a closure unit having first and second plates, a roller support arranged between the plates, multiple roller pairs, each formed from first and second spreading rollers, and a spring. The plates are carried together with the roller support when it moves parallel to a movement direction from the open position into an intermediate position, and an additional movement of the plates in the movement direction is blocked when the roller support moves from the intermediate position into a closed position, during which the spreading rollers move along rising flanks of recesses, and the plates are thus spread apart. Rotational axes of the spreading rollers of each roller pair are offset relative to each other and are spaced apart in the spreading direction by a distance smaller than a sum of the radiuses of the spreading rollers.

Abstract: An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).

Abstract: A vacuum valve has a valve opening (2, 3) that is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state and rests against the valve seat (6, 7) in a closed state, and a carrier unit (9) that supports the valve plate (10, 11) and moves between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) moves between a retracted position and an extended position. In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state. In the retracted position, the valve plate (10, 11) is supported against the carrier unit (9).

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.