Patents by Inventor Florian Kanal

Florian Kanal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUVL PRECISION COMPONENT WITH SPECIFIC THERMAL EXPANSION BEHAVIOR
    Publication number: 20240077798
    Abstract: A precision extreme ultraviolet lithography (EUVL) component having an average coefficient of thermal expansion (CTE) in a range from 0 to 50° C. of at most 0±0.1×10?6/K, and a thermal hysteresis of <0.1 ppm at least in the temperature range from 19 to 25° C., and an index F of <1.2. F=TCL (0; 50° C.)/|expansion (0; 50° C)|, where TCL is a total change of length.
    Type: Application
    Filed: September 15, 2023
    Publication date: March 7, 2024
    Applicant: Schott AG
    Inventors: Florian Kanal, Ralf Jedamzik, Ina Mitra