Abstract: A method for changing test substrates in a continuous-flow vacuum system in a multiple-treatment-step process cycle for treating a substrate, a treatment method using the method for changing test substrates, and systems for treating a plurality of substrates (61) and for changing test substrates. For at least two treatment steps, at least two test substrates (66) are transferred to a vacuum treatment system at the beginning of the process cycle and are transferred back out once the process cycle is concluded. Subsequently, the first test substrate (66) concurrently treated in this step is removed from the measurement position (70) it occupied during the treatment and is deposited in an empty position (71) without a test substrate (66). Subsequently, the second test substrate (66) which has not been treated yet is deposited in the resulting free measurement position (70) for the purpose of supplying the second test substrate to the subsequent treatment step.

Abstract: A method of monitoring a tool clamping device mounted on a machine spindle, the clamping force of which tool clamping device is generated by a spring assembly which exerts a force in the direction of the clamping position on an actuating element actuating the clamping or the release of a tool or tool holder. In the method, the spring force and the displacement of the actuating element are continuously measured during the release and/or clamping of a tool or tool holder and recorded as functions of the time. These recorded functions are used to identify at least one parameter characteristic for the status of the tool clamping device. Based on the spring force and the displacement over time, a spring characteristic curve is plotted in the form of the spring force as a function of displacement, the analysis of which spring characteristic curve provides information about a number of characteristic parameters.

Abstract: In a device for recording deformation of a rotor head of a work spindle, at least one magnet is arranged on a stator or a rotor of the spindle, the magnetic field of which penetrates a measurement section of the rotor head, which is traversed by an axial flow of force during clamping of a tool or tool carrier on the rotor head by a tool clamping device arranged in the rotor. The rotor head has a magnetizability or magnetization that varies in the axial direction in its measurement section, and at least one direction-sensitive magnetic field sensor is arranged on the stator radially opposite the measurement section, which is connected to an evaluation device to determine axial deformation of the rotor head as a function of rotation angle from the strength of the magnetic field as a function of rotation angle recorded by the sensor during one revolution of the rotor.

Abstract: A method of monitoring a tool clamping device mounted on a machine spindle, the clamping force of which tool clamping device is generated by a spring assembly which exerts a force in the direction of the clamping position on an actuating element actuating the clamping or the release of a tool or tool holder. In the method, the spring force and the displacement of the actuating element are continuously measured during the release and/or clamping of a tool or tool holder and recorded as functions of the time. These recorded functions are used to identify at least one parameter characteristic for the status of the tool clamping device. Based on the spring force and the displacement over time, a spring characteristic curve is plotted in the form of the spring force as a function of displacement, the analysis of which spring characteristic curve provides information about a number of characteristic parameters.