Abstract: An impedance matching network comprising an input port connectable to a radio frequency (RF) generator circuit and an output port connectable to a load. A transmission line is connected between the output port to the input port. The impedance matching network comprises an impedance matching circuit comprising a primary circuit, a secondary circuit, at least one inductance, at least one reactance, and a switching circuit. The primary circuit is connected to the transmission line or is arranged in the transmission line. The secondary circuit comprises the at least one reactance. The at least one inductance is configured to couple the primary circuit with the secondary circuit. The switching circuit is configured to selectively electrically connect or disconnect the secondary circuit.

Abstract: An impedance matching network for plasma processes includes an input port being connectable to a radio frequency (RF) generator circuit, an output port being connectable to a load, and a transmission circuit. The transmission circuit connects the output port to the input port. The transmission circuit includes a first transmission line and a second transmission line, wherein the first transmission line is electrically connected to the input port, and wherein the second transmission line is electrically connected to the output port. The impedance matching network further includes a first impedance matching circuit configured to connect at least one reactance to the transmission circuit. The impedance matching network further includes a coupling element, wherein the first transmission line and the second transmission line are coupled to each other by the coupling element, and wherein the coupling element provides an inductive coupling between the first transmission line and the second transmission line.

Abstract: An impedance matching network for plasma processes includes an input port, an output port, and a transmission line that connects the output port to the input port. The network includes a first impedance matching circuit configured to connect at least one reactance to the transmission line. The first impedance matching circuit includes a first reactance set and a second reactance set. The first reactance set includes least one adjustable reactance, wherein an impedance of the at least one adjustable reactance is adaptable. The second reactance set includes least one non-adjustable reactance, wherein an impedance of the at least one non-adjustable reactance is fixed. The first reactance set and the second reactance set are arranged in parallel to each other. The first impedance matching circuit is configured to switch reactances of the first reactance set and of the second reactance set to the transmission line independent of each other.

Abstract: A system including a radio frequency (RF) generator module, a matching network and at least one plasma chamber. The matching network is connected to an output interface of the RF generator module such that the matching network is arranged between the RF generator module and the plasma chamber. The RF generator module is configured to output via the output interface an RF signal. The RF generator module has at least one amplifier with an amplifier output impedance. The RF generator module has a generator output impedance. A control module is configured to control the matching network in dependence of an RF power to be outputted via the output interface, thereby adapting the amplifier output impedance of the at least one amplifier and the generator output impedance of the RF generator module in order to perform a load modulation of the at least one amplifier and the RF generator module.

Abstract: Magnetic core for a balun, balun with a magnetic core and method for manufacturing a magnetic core. In particular, a magnetic core is provided comprising multiple core elements, wherein the individual core elements are concentrically arranged. Furthermore, a heat sink is arranged between two adjacent core elements. By using multiple core elements for a magnetic core, the individual core elements can be adapted to different frequency ranges. In this way, the magnetic core may be used for a balun having a broad frequency range. Furthermore, thermal energy generated in the magnetic core can be dissipated by the heat sinks between the individual core elements. In this way, the power handling capability of the magnetic core can be increased.

Abstract: The invention relates to a broadband high power amplifier that comprises a signal input adapted to receive an input signal, at least one amplifier stage adapted to amplify the received input signal, a signal output adapted to output the signal amplified by the at least one amplifier stage as an output signal, a monitoring unit adapted to monitor signal characteristics of the input signal and the output signal and a control unit adapted to operate the at least one amplifier stage at an optimal operating point depending on the current signal characteristics monitored by said monitoring unit.

Abstract: An improved amplification of multiband signals for an uplink, in particular a satellite uplink is provided. For this purpose, multiple signals for separate frequency bands may be provided to a number of two or more uplink converters. The output of each uplink converter is amplified by a separate amplifier and the separately amplified signals are combined to obtain an amplified multiband uplink signal. In particular a waveguide combiner may be used for combining the amplified signals.

Abstract: An improved amplification of multiband signals for an uplink, in particular a satellite uplink is provided. For this purpose, multiple signals for separate frequency bands may be provided to a number of two or more uplink converters. The output of each uplink converter is amplified by a separate amplifier and the separately amplified signals are combined to obtain an amplified multiband uplink signal. In particular a waveguide combiner may be used for combining the amplified signals.

Abstract: Magnetic core for a balun, balun with a magnetic core and method for manufacturing a magnetic core. In particular, a magnetic core is provided comprising multiple core elements, wherein the individual core elements are concentrically arranged. Furthermore, a heat sink is arranged between two adjacent core elements. By using multiple core elements for a magnetic core, the individual core elements can be adapted to different frequency ranges. In this way, the magnetic core may be used for a balun having a broad frequency range. Furthermore, thermal energy generated in the magnetic core can be dissipated by the heat sinks between the individual core elements.

Abstract: The invention relates to a broadband high power amplifier that comprises a signal input adapted to receive an input signal, at least one amplifier stage adapted to amplify the received input signal, a signal output adapted to output the signal amplified by the at least one amplifier stage as an output signal, a monitoring unit adapted to monitor signal characteristics of the input signal and the output signal and a control unit adapted to operate the at least one amplifier stage at an optimal operating point depending on the current signal characteristics monitored by said monitoring unit.

Abstract: The present invention provides an amplifier circuit for amplifying an incoming signal, the amplifier circuit comprising at least two signal paths configured to amplify signals of different overlapping frequency bands, a signal splitter comprising an input port configured to receive the incoming signal, the signal splitter being coupled to an input side of the signal paths and configured to split the incoming signal into split signals for the signal paths, and a diplexer coupled to an output side of the signal paths and configured to combine the amplified signals and provide a combined amplified signal. Further, the present invention provides a respective method.

Abstract: An amplifier device for high frequency signals, in particular a linear high frequency amplifier device, which comprises at least one input, an incoming line, a pre-distortion unit, in particular an adaptive pre-distortion unit, an amplifier unit, in particular a non-linear power amplifier unit, a transmission line, a feedback unit, and an output. The output is connected to the amplifier unit via the transmission line. In addition, the at least one input is connected to the pre-distortion unit such that two incoming branch lines are provided which are interconnected by a switching unit. A first incoming branch line of the incoming branch lines comprises a down-converter being arranged between the at least one input and the pre-distortion unit.

Abstract: The present invention provides an amplifier circuit for amplifying an incoming signal, the amplifier circuit comprising at least two signal paths configured to amplify signals of different overlapping frequency bands, a signal splitter comprising an input port configured to receive the incoming signal, the signal splitter being coupled to an input side of the signal paths and configured to split the incoming signal into split signals for the signal paths, and a diplexer coupled to an output side of the signal paths and configured to combine the amplified signals and provide a combined amplified signal. Further, the present invention provides a respective method.

Abstract: An amplifier device for high frequency signals, in particular a linear high frequency amplifier device, which comprises at least one input, an incoming line, a pre-distortion unit, in particular an adaptive pre-distortion unit, an amplifier unit, in particular a non-linear power amplifier unit, a transmission line, a feedback unit, and an output. The output is connected to the amplifier unit via the transmission line. In addition, the at least one input is connected to the pre-distortion unit such that two incoming branch lines are provided which are interconnected by a switching unit. A first incoming branch line of the incoming branch lines comprises a down-converter being arranged between the at least one input and the pre-distortion unit.