Patents by Inventor Florian Palitschka

Florian Palitschka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for coating a substrate with a lacquer and device for planarising a lacquer layer
    Patent number: 11247229
    Abstract: The disclosure relates to a method for coating a substrate with a lacquer. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarising a lacquer layer.
    Type: Grant
    Filed: January 24, 2019
    Date of Patent: February 15, 2022
    Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
    Inventors: Katrin Fischer, Florian Palitschka, Johannes Platen, Kento Kaneko
  • Method for coating a substrate and coating device
    Patent number: 10688524
    Abstract: A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: June 23, 2020
    Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
    Inventors: Katrin Fischer, Florian Palitschka, Johannes Platen, Kento Kaneko
  • Method for coating a substrate with a lacquer and device for planarising a lacquer layer
    Publication number: 20190151889
    Abstract: The disclosure relates to a method for coating a substrate with a lacquer. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarising a lacquer layer.
    Type: Application
    Filed: January 24, 2019
    Publication date: May 23, 2019
    Inventors: Katrin FISCHER, Florian PALITSCHKA, Johannes PLATEN, Kento KANEKO
  • Method for coating a substrate with a lacquer and device for planarising a lacquer layer
    Patent number: 10232405
    Abstract: A method for coating a substrate with a lacquer is disclosed. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarizing a lacquer layer.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: March 19, 2019
    Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
    Inventors: Katrin Fischer, Florian Palitschka, Johannes Platen, Kento Kaneko
  • Method for coating a substrate
    Patent number: 9799554
    Abstract: A method for coating substrates provided with vias uses a first step in which the substrate is conditioned and a second step in which the substrate is coated with an electrically insulating material such that the vias are filled up completely.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: October 24, 2017
    Assignee: SUSS MicroTec Lithography GmbH
    Inventors: Katrin Fischer, Florian Palitschka, Darren Robert Southworth, William Whitney
  • Method for Coating a Substrate
    Publication number: 20160300759
    Abstract: A method for coating substrates provided with vias uses a first step in which the substrate is conditioned and a second step in which the substrate is coated with an electrically insulating material such that the vias are filled up completely.
    Type: Application
    Filed: April 8, 2016
    Publication date: October 13, 2016
    Inventors: Katrin Fischer, Florian Palitschka, Darren Robert Southworth, William Whitney
  • METHOD FOR COATING A SUBSTRATE WITH A LACQUER AND DEVICE FOR PLANARISING A LACQUER LAYER
    Publication number: 20160089693
    Abstract: The disclosure relates to a method for coating a substrate with a lacquer. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarising a lacquer layer.
    Type: Application
    Filed: September 22, 2015
    Publication date: March 31, 2016
    Inventors: Katrin Fischer, Florian Palitschka, Johannes Platen, Kento Kaneko
  • METHOD FOR COATING A SUBSTRATE AND COATING DEVICE
    Publication number: 20160089691
    Abstract: A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates.
    Type: Application
    Filed: September 22, 2015
    Publication date: March 31, 2016
    Inventors: Katrin Fischer, Florian Palitschka, Johannes Platen, Kento Kaneko