Abstract: Surface measuring apparatus for measuring a surface of a workpiece has a probe for contacting the surface of workpiece, a feed apparatus for moving probe relative to surface of the workpiece along a feed axis for sampling surface of workpiece. The probe outputs a probe output signal during sampling of the workpiece. An evaluation apparatus is in data transmission connection with probe and is designed and programmed to reconstruct the profile of the surface of workpiece based on the probe output signal. Evaluation apparatus is designed and programmed to determine an apparatus frequency signature representing characteristic natural frequencies of the surface measuring apparatus, and an analyzer is provided which detects and analyzes the temporal course of the apparatus frequency signature, such that the functional state of the surface measuring apparatus is assessed based on the temporal course of the apparatus frequency signature.

Abstract: Surface measuring apparatus for measuring a surface of a workpiece has a probe for contacting the surface of workpiece, a feed apparatus for moving probe relative to surface of the workpiece along a feed axis for sampling surface of workpiece. The probe outputs a probe output signal during sampling of the workpiece. An evaluation apparatus is in data transmission connection with probe and is designed and programmed to reconstruct the profile of the surface of workpiece based on the probe output signal. Evaluation apparatus is designed and programmed to determine an apparatus frequency signature representing characteristic natural frequencies of the surface measuring apparatus, and an analyzer is provided which detects and analyzes the temporal course of the apparatus frequency signature, such that the functional state of the surface measuring apparatus is assessed based on the temporal course of the apparatus frequency signature.