Patents by Inventor Floris ZOETHOUT

Floris ZOETHOUT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for and a method of removing contaminant particles from a component of an apparatus
    Patent number: 11123773
    Abstract: An apparatus (300) for removing contaminant particles (205) from a component (202, 204) of an apparatus (140, MT), the contaminant particles giving rise to an ambient electric field (E), the apparatus comprising: a collection region (301) for attracting the particles, wherein the ambient electric field is at least between the component and the collection region; and an electric field generator configured to establish an applied electric field between the collection region and the component to cause the particles to be transported from the component to the collection region, wherein the electric field generator is configured to determine the polarity of the applied electric field based on the ambient electric field.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: September 21, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Tim Peter Johan Gerard Maas, Bartolomeus Martinus Johannes Van Hout, Henricus Wilhelmus Maria Van Buel, Floris Zoethout
  • Apparatus for and a Method of Removing Contaminant Particles from a Component of an Apparatus
    Publication number: 20190201943
    Abstract: An apparatus (300) for removing contaminant particles (205) from a component (202, 204) of an apparatus (140, MT), the contaminant particles giving rise to an ambient electric field (E), the apparatus comprising: a collection region (301) for attracting the particles, wherein the ambient electric field is at least between the component and the collection region; and an electric field generator configured to establish an applied electric field between the collection region and the component to cause the particles to be transported from the component to the collection region, wherein the electric field generator is configured to determine the polarity of the applied electric field based on the ambient electric field.
    Type: Application
    Filed: December 27, 2018
    Publication date: July 4, 2019
    Applicant: ASML Netherlands B.V.
    Inventors: Tim Peter Johan Gerard MAAS, Bartolomeus Martinus Johannes VAN HOUT, Henricus Wilhelmus Maria VAN BUEL, Floris ZOETHOUT