Patents by Inventor Forest Buzan

Forest Buzan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer center finding
    Patent number: 7792350
    Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
    Type: Grant
    Filed: March 5, 2007
    Date of Patent: September 7, 2010
    Assignee: Brooks Automation, Inc.
    Inventors: Chris Kiley, Peter van der Meulen, Forest Buzan, Paul E. Fogel
  • WAFER CENTER FINDING
    Publication number: 20070285673
    Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
    Type: Application
    Filed: March 5, 2007
    Publication date: December 13, 2007
    Inventors: Christopher Kiley, Peter van der Meulen, Forest Buzan, Paul Fogel