Patents by Inventor Forest Chien

Forest Chien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for oxidizing nitrides
    Publication number: 20060110932
    Abstract: A method for oxidizing a nitride film is disclosed, which includes the steps of: providing a nitride film formed on an electrically conductive substrate; irradiating the nitride film with a light beam and getting close to the nitride film with a electrically conductive probe; and exerting a bias between the electrically conductive substrate and the electrically conductive probe. The method can oxidize the nitrides quickly and reduce the cost building a nano-structure in the nitride film. An apparatus for oxidizing a nitride film is also disclosed herewith.
    Type: Application
    Filed: January 4, 2006
    Publication date: May 25, 2006
    Applicant: Industrial Technology Research Institute
    Inventors: Hung-Ming Tai, Forest Chien
  • Method and apparatus for oxidizing nitrides
    Publication number: 20050142891
    Abstract: A method for oxidizing a nitride film is disclosed, which includes the steps of: providing a nitride film formed on an electrically conductive substrate; irradiating the nitride film with a light beam and getting close to the nitride film with a electrically conductive probe; and exerting a bias between the electrically conductive substrate and the electrically conductive probe. The method can oxidize the nitrides quickly and reduce the cost building a nano-structure in the nitride film. An apparatus for oxidizing a nitride film is also disclosed herewith.
    Type: Application
    Filed: October 5, 2004
    Publication date: June 30, 2005
    Applicant: Industrial Technology Research Institute
    Inventors: Hung-Ming Tai, Forest Chien