Patents by Inventor Forrest Gilbert Yetter, Jr.

Forrest Gilbert Yetter, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Determining process condition in substrate processing module
    Patent number: 8046193
    Abstract: A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for a more simplified configuration.
    Type: Grant
    Filed: April 21, 2008
    Date of Patent: October 25, 2011
    Assignee: KLA-Tencor Corporation
    Inventors: Forrest Gilbert Yetter, Jr., Jeffrey M. Parker, Wayne G. Renken, John B. Pieper
  • Methods of configuring a sensor network
    Patent number: 7363195
    Abstract: A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for network configuration.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: April 22, 2008
    Assignee: Sensarray Corporation
    Inventors: Forrest Gilbert Yetter, Jr., Jeffrey M. Parker, Wayne G. Renken, John B. Pieper