Patents by Inventor Forrest T. Buzan
Forrest T. Buzan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8934706Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: GrantFiled: January 20, 2014Date of Patent: January 13, 2015Assignee: Brooks Automation, Inc.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Publication number: 20140207284Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: ApplicationFiled: January 20, 2014Publication date: July 24, 2014Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Patent number: 8634633Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: GrantFiled: September 14, 2012Date of Patent: January 21, 2014Assignee: Brooks Automation, Inc.Inventors: Christopher C Kiley, Peter van der Meulen, Forrest T Buzan, Paul E. Fogel
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Publication number: 20130085595Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: ApplicationFiled: September 14, 2012Publication date: April 4, 2013Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Patent number: 8270702Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: GrantFiled: September 3, 2010Date of Patent: September 18, 2012Assignee: Brooks Automation, Inc.Inventors: Christopher C Kiley, Peter van der Meulen, Forrest T Buzan, Paul E. Fogel
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Patent number: 8253948Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: GrantFiled: February 27, 2012Date of Patent: August 28, 2012Assignee: Brooks Automation, Inc.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Publication number: 20120154822Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: ApplicationFiled: February 27, 2012Publication date: June 21, 2012Applicant: BROOKS AUTOMATION, INC.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Patent number: 8125652Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: GrantFiled: December 23, 2010Date of Patent: February 28, 2012Assignee: Brooks Automation, Inc.Inventors: Paul E. Fogel, Peter van der Meulen, Forrest T. Buzan, Christopher C. Kiley
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Publication number: 20110093237Abstract: A device for handling a substantially circular wafer is provided. The device includes an interior accessible through a plurality of entrances, and a plurality of sensors consisting of two sensors for each one of the plurality of entrances, each sensor capable of detecting a presence of the substantially circular wafer, at a predetermined location within the interior, wherein the plurality of sensors are arranged so that at least two of the plurality of sensors detect the wafer for any position of the wafer entirely within the interior, wherein a first one of the two sensors is positioned to detect the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances, and a second one of the two sensors is positioned immediately outside a diameter of the wafer when the wafer has passed entirely into the interior through one of the plurality of entrances.Type: ApplicationFiled: December 23, 2010Publication date: April 21, 2011Applicant: BROOKS AUTOMATION, INC.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Patent number: 7894657Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.Type: GrantFiled: February 15, 2008Date of Patent: February 22, 2011Assignee: Brooks Automation, Inc.Inventors: Peter van der Meulen, Forrest T. Buzan
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Publication number: 20100324732Abstract: A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.Type: ApplicationFiled: September 3, 2010Publication date: December 23, 2010Applicant: BROOKS AUTOMATION, INC.Inventors: Christopher C. Kiley, Peter van der Meulen, Forrest T. Buzan, Paul E. Fogel
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Publication number: 20080255798Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.Type: ApplicationFiled: February 15, 2008Publication date: October 16, 2008Inventor: Forrest T. Buzan
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Publication number: 20080147333Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.Type: ApplicationFiled: February 15, 2008Publication date: June 19, 2008Inventors: Peter van der Meulen, Forrest T. Buzan
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Publication number: 20080145194Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.Type: ApplicationFiled: February 15, 2008Publication date: June 19, 2008Inventors: Christopher C. Kiley, Forrest T. Buzan
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Patent number: 6239582Abstract: An alternator system having a single voltage sensor and a half-wave controlled rectifier bridge for increasing/decreasing alternator output power is disclosed. The half-wave controlled rectifier bridge includes three diodes and three active switches. The alternator system further includes a controlled field winding coupled to a three-phase stator winding; a battery; and, a controller for controlling the active switches and the field winding for increasing/decreasing the alternator output power. The controller uses edges sensed by the single voltage sensor for determining optimum activation and deactivation times for the three active switches in the bridge, and then controlling the switches in accordance with the determined optimum switching times.Type: GrantFiled: November 4, 1999Date of Patent: May 29, 2001Assignee: SatCon Technology CorporationInventors: Forrest T. Buzan, Geoffrey B. Lansberry, Keith D. Szolusha