Abstract: The invention relates to a device for introducing a carrier gas and liquid compounds or a liquid solution into an evaporation chamber, comprising a mixing chamber, including at least:—a first inlet for the admission of said compounds or said solution,—a second inlet for the admission of the carrier gas,—and an outlet connected to an inlet of an injector, so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet, into the evaporation chamber.

Abstract: The invention relates to a device for introducing a carrier gas and liquid compounds or a liquid solution into an evaporation chamber, comprising a mixing chamber, including at least:—a first inlet for the admission of said compounds or said solution,—a second inlet for the admission of the carrier gas,—and an outlet connected to an inlet of an injector, so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet, into the evaporation chamber.

Abstract: The invention relates to a device for introducing (1) a carrier gas (2) and liquid compounds (3) or a liquid solution into an evaporation chamber (4), comprising a mixing chamber (10), including at least: —a first inlet (8) for the admission of said compounds or said solution (3), —a second inlet (9) for the admission of the carrier gas (2), —and an outlet (13) connected to an inlet of an injector (14), so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet (14), into the evaporation chamber (4).

Abstract: A device for injecting into a chamber at least one precursor comprises at least one tank containing the precursor, means for keeping the tank at a higher pressure than that of the chamber, and at least one injector connected to the tank. It also comprises a device for measuring the mean flowrate, arranged between the tank and the injector and a mechanical low-pass filter arranged between the device for measuring the flowrate and the injector. The control circuit comprises outputs respectively connected to the tank and to the injector for controlling said pressure and/or the injection time and/or the injection frequency, in such a way as to periodically inject droplets of precursor into the chamber. The control circuit also comprises a regulation input connected to the output of the device for measuring the mean flowrate, in such a way as to control said pressure and/or the injection time and/or the injection frequency in order to keep the mean flowrate at a predetermined set-point.

Abstract: The invention relates to a device for introducing (1) a carrier gas (2) and liquid compounds (3) or a liquid solution into an evaporation chamber (4), comprising a mixing chamber (10), including at least: —a first inlet (8) for the admission of said compounds or said solution (3), —a second inlet (9) for the admission of the carrier gas (2), —and an outlet (13) connected to an inlet of an injector (14), so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet (14), into the evaporation chamber (4).