Patents by Inventor François Sylvain

François Sylvain has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mask assembly
    Patent number: 11009803
    Abstract: A mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount is configured to suspend the pellicle frame relative to the patterning device such that there is a gap between the pellicle frame and the patterning device; and wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: May 18, 2021
    Assignees: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns, Marc Bruijn, Richard Joseph Bruls, Jeroen Dekkers, Paul Janssen, Mohammad Reza Kamali, Ronald Harm Gunther Kramer, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Matthew Lipson, Erik Roelof Loopstra, Joseph H. Lyons, Stephen Roux, Gerrit Van Den Bosch, Sander Van Den Heijkant, Sandra Van Der Graaf, Frits Van Der Meulen, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge
  • Pellicle attachment apparatus
    Patent number: 11003098
    Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: May 11, 2021
    Assignee: ASML Netherlands B.V
    Inventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kester, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
  • Pellicle attachment apparatus
    Patent number: 10969701
    Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: April 6, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kester, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
  • Pellicle Attachment Apparatus
    Publication number: 20200096882
    Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.
    Type: Application
    Filed: November 18, 2019
    Publication date: March 26, 2020
    Applicant: ASML Netherlands B.V.
    Inventors: Frits VAN DER MEULEN, Maarten Mathijs Marinus JANSEN, Jorge Manuel AZEREDO LIMA, Derk Servatius Gertruda BROUNS, Marc BRUIJN, Jeroen DEKKERS, Paul JANSSEN, Ronald Harm Gunther KRAMER, Matthias KRUIZINGA, Robert Gabriël Maria LANSBERGEN, Martinus Hendrikus Antonius LEENDERS, Erik Roelof LOOPSTRA, Gerrit VAN DEN BOSCH, Jérôme François Sylvain Virgile VAN LOO, Beatrijs Louise Marie-Joseph Katrien VERBRUGGE, Angelo Cesar Peter DE KLERK, Jacobus Maria DINGS, Maurice Leonardus Johannes JANSSEN, Roland Jacobus Johannes KERSTENS, Martinus Jozef Maria KESTERS, Michel LOOS, Geert MIDDEL, Silvester Matheus REIJNDERS, Frank Johannes Christiaan THEUERZEIT, Anne Johannes Wilhelmus VAN LIEVENOOGEN
  • Mask assembly
    Patent number: 10558129
    Abstract: A mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount is configured to suspend the pellicle frame relative to the patterning device such that there is a gap between the pellicle frame and the patterning device; and wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: February 11, 2020
    Assignees: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Matthias Kruizinga, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Erik Willem Bogaart, Derk Servatius Gertruda Brouns, Marc Bruijn, Richard Joseph Bruls, Jeroen Dekkers, Paul Janssen, Mohammad Reza Kamali, Ronald Harm Gunther Kramer, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Matthew Lipson, Erik Roelof Loopstra, Joseph H. Lyons, Stephen Roux, Gerrit Van Den Bosch, Sander Van Den Heijkant, Sandra Van Der Graaf, Frits Van Der Meulen, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge
  • Pellicle attachment apparatus
    Patent number: 10539886
    Abstract: A mask assembly suitable for use in a lithographic process. The mask assembly comprises a patterning device, a sub-frame secured to the patterning device, a pellicle frame configured to support a pellicle and a mechanical attachment interface operable to allow attachment of the pellicle frame to the sub-frame and detachment of the pellicle frame from the sub-frame.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: January 21, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kesters, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
  • Pellicle Attachment Apparatus
    Publication number: 20200012204
    Abstract: Tooling for a mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.
    Type: Application
    Filed: September 16, 2019
    Publication date: January 9, 2020
    Applicant: ASML Netherlands B.V.
    Inventors: Frits Van Der Meulen, Maarten Mathijs Marinus Jansen, Jorge Manuel Azeredo Lima, Derk Servatius Gertruda Brouns, Marc Bruijn, Jeroen Dekkers, Paul Janssen, Ronald Harm, Gunther Kramer, Matthias Kruizinga, Robert Gabriël Maria Lansbergen, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Gerrit Van Den Bosch, Jérôme François Sylvain Virgile Van Loo, Beatrijs Louise Marie-Joseph Katrien Verbrugge, Angelo Cesar Peter De Klerk, Jacobus Maria Dings, Maurice Leonardus Johannes Janssen, Roland Jacobus Johannes Kerstens, Martinus Jozef Maria Kesters, Michel Loos, Geert Middel, Silvester Matheus Reijnders, Frank Johannes Christiaan Theuerzeit, Anne Johannes Wilhelmus Van Lievenoogen
  • Mask Assembly
    Publication number: 20180329314
    Abstract: A mask assembly suitable for use in a lithographic process, the mask assembly comprising a patterning device; and a pellicle frame configured to support a pellicle and mounted on the patterning device with a mount; wherein the mount is configured to suspend the pellicle frame relative to the patterning device such that there is a gap between the pellicle frame and the patterning device; and wherein the mount provides a releasably engageable attachment between the patterning device and the pellicle frame.
    Type: Application
    Filed: November 16, 2015
    Publication date: November 15, 2018
    Inventors: Matthias KRUIZINGA, Maarten Mathijs Marinus JANSEN, Jorge Manuel AZEREDO LIMA, Erik Willem BOGAART, Derk Servatius Gertruda BROUNS, Marc BRUIJN, Richard Joseph BRULS, Jeroen DEKKERS, Paul JANSSEN, Mohammad Reza KAMALI, Ronald Harm Gunther KRAMER, Robert Gabriël Maria LANSBERGEN, Martinus Hendrikus Antonius LEENDERS, Matthew LIPSON, Erik Roelof LOOPSTRA, Joseph H. LYONS, Stephen ROUX, Gerrit VAN DEN BOSCH, Sander VAN DEN HEIJKANT, Sandra VAN DER GRAAF, Frits VAN DER MEULEN, Jérôme François Sylvain Virgile VAN LOO, Beatrijs Louise Marie-Joseph Katrien VERBRUGGE
  • Wheeled vehicle for transferring heavy loads, having a plurality of low-height articulated modules
    Patent number: 9834124
    Abstract: The wheeled vehicle enables heavy loads that are mounted on low-height legs to be lifted and transported. Indeed, it is provided with a plurality of wheeled modules (6, 7, 19) that are articulated to each other and have large-diameter wheels. The means for raising the load are centrally placed relative to the longitudinal axis of the wheeled modules. The raising thereof by central jacks makes it possible to lift the load (3) and the loading platform (20) thereof, the ends of which rest on each of the end wheeled modules (46, 47) by way of articulated jacks that control the height of the loading platform (20). Application to the transfer of hoods for waste containers to be stored.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: December 5, 2017
    Assignee: AGENCE NATIONALE POUR LA GESTION DES DÉCHETS RADIOACTIFS
    Inventors: Damien Pons, Jean-François Herve, Rudy Southway, François-Sylvain Crosnier
  • WHEELED VEHICLE FOR TRANSFERRING HEAVY LOADS, HAVING A PLURALITY OF LOW-HEIGHT ARTICULATED MODULES
    Publication number: 20160159263
    Abstract: The wheeled vehicle enables heavy loads that are mounted on low-height legs to be lifted and transported. Indeed, it is provided with a plurality of wheeled modules (6, 7, 19) that are articulated to each other and have large-diameter wheels. The means for raising the load are centrally placed relative to the longitudinal axis of the wheeled modules. The raising thereof by central jacks makes it possible to lift the load (3) and the loading platform (20) thereof, the ends of which rest on each of the end wheeled modules (46, 47) by way of articulated jacks that control the height of the loading platform (20). Application to the transfer of hoods for waste containers to be stored.
    Type: Application
    Filed: July 22, 2014
    Publication date: June 9, 2016
    Applicant: Agence Nationale Pour la Gestion des Dechets Radioactifs
    Inventors: Damien Pons, Jean-François Herve, Rudy Southway, François-Sylvain Crosnier
  • Mechanical connection device between a motorized vehicle and working equipment
    Patent number: 8540269
    Abstract: The present disclosure relates to a mechanical connection device between a motorized vehicle and working equipment. According to the present disclosure, the device includes a rigid plate mounted by means of axles in the tow rings of the vehicle and bearing adjustable skids that are applied against a transverse surface of the vehicle, such as to abutt the connection device to the vehicle, thereby securing the same.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: September 24, 2013
    Assignee: MBDA France
    Inventors: Dominique Hembise, François Sylvain Crosnier, Alain Guesdon
  • Mobile equipment for detonating explosives and a motorized unit for securing roads, tracks or similar
    Patent number: 8522661
    Abstract: The present disclosure relates to mobile equipment for detonating explosives and a motorized unit for securing roads, tracks or similar. According to the present disclosure, the mobile equipment includes a supporting structure with a transverse beam having explosive-activation means mounted thereon, said means comprising at least a mass decoy device, a mechanical decoy device, a thermal electrical decoy device and controllable clearing means.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: September 3, 2013
    Assignee: MBDA France
    Inventors: Dominique Hembise, François Sylvain Crosnier, Christophe Hubert-Habart
  • Lithographic apparatus with pre-formed flexible transportation line
    Patent number: 8125616
    Abstract: A lithographic apparatus includes, in an embodiment, an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and a flexible transportation line extending between a first and second part of the apparatus, the second part moveable with respect to the first part, wherein the line is pre-formed in a three-dimensional curve.
    Type: Grant
    Filed: December 1, 2008
    Date of Patent: February 28, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Marcus Martinus Petrus Adrianus Vermeulen, Henrikus Herman Marie Cox, Godfried Katharina Hubertus Franciscus Geelen, Jérôme François Sylvain Virgile Van Loo
  • Horizontal laminated ski construction
    Patent number: 8104784
    Abstract: A core assembly for a gliding board such as a ski or a snowboard. The core assembly includes a plurality of horizontal layers that are sized to various desired lengths, positioned to achieve a desired thickness profile, and laminated. A method of making a core assembly for a gliding board.
    Type: Grant
    Filed: January 12, 2009
    Date of Patent: January 31, 2012
    Assignee: K-2 Corporation
    Inventor: François Sylvain
  • MOBILE EQUIPMENT FOR DETONATING EXPLOSIVES AND A MOTORIZED UNIT FOR SECURING ROADS, TRACKS OR SIMILAR
    Publication number: 20110232468
    Abstract: The present disclosure relates to mobile equipment for detonating explosives and a motorized unit for securing roads, tracks or similar. According to the present disclosure, the mobile equipment includes a supporting structure with a transverse beam having explosive-activation means mounted thereon, said means comprising at least a mass decoy device, a mechanical decoy device, a thermal electrical decoy device and controllable clearing means.
    Type: Application
    Filed: December 8, 2009
    Publication date: September 29, 2011
    Inventors: Dominique Hembise, François Sylvain Crosnier, Christophe Hubert-Habart
  • MECHANICAL CONNECTION DEVICE BETWEEN A MOTORIZED VEHICLE AND WORKING EQUIPMENT
    Publication number: 20110233898
    Abstract: The present disclosure relates to a mechanical connection device between a motorized vehicle and working equipment. According to the present disclosure, the device includes a rigid plate mounted by means of axles in the tow rings of the vehicle and bearing adjustable skids that are applied against a transverse surface of the vehicle, such as to abutt the connection device to the vehicle, thereby securing the same.
    Type: Application
    Filed: December 8, 2009
    Publication date: September 29, 2011
    Inventors: Dominique Hembise, Francois Sylvain Crosnier, Alain Guesdon
  • HORIZONTAL LAMINATED SKI CONSTRUCTION
    Publication number: 20090179402
    Abstract: The invention relates to a core assembly for a gliding board such as a ski or a snowboard. The core assembly includes a plurality of horizontal layers that are sized to various desired lengths, positioned to achieve a desired thickness profile, and laminated. The invention also relates to a method of making a core assembly for a gliding board.
    Type: Application
    Filed: January 12, 2009
    Publication date: July 16, 2009
    Inventor: Francois Sylvain
  • Lithographic Apparatus with Pre-Formed Flexible Transportation Line
    Publication number: 20090169661
    Abstract: A lithographic apparatus includes, in an embodiment, an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and a flexible transportation line extending between a first and second part of the apparatus, the second part moveable with respect to the first part, wherein the line is pre-formed in a three-dimensional curve.
    Type: Application
    Filed: December 1, 2008
    Publication date: July 2, 2009
    Applicant: ASML Netherlands B.V.
    Inventors: Marcus Martinus Petrus Adrianus VERMEULEN, Henrikus Herman Marie Cox, Godfried Katharina Hubertus Franciscus Geelen, Jerome Francois Sylvain Virgile Van Loo