Patents by Inventor Frances Hill

Frances Hill has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTRON BEAM GENERATION AND MEASUREMENT
    Publication number: 20190108967
    Abstract: A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
    Type: Application
    Filed: October 2, 2018
    Publication date: April 11, 2019
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Frances Hill, Michael E. Romero, Rudy F. Garcia
  • PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USING A PHOTOCATHODE
    Publication number: 20190108964
    Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
    Type: Application
    Filed: October 3, 2018
    Publication date: April 11, 2019
    Inventors: Katerina Ioakeimidi, Gildardo R. Delgado, Michael E. Romero, Frances Hill, Rudy F. Garcia
  • Electron beam emitters with ruthenium coating
    Patent number: 10141155
    Abstract: An emitter with a protective cap layer on an exterior surface of the emitter is disclosed. The emitter can have a diameter of 100 nm or less. The protective cap layer includes ruthenium. Ruthenium is resistant to oxidation and carbon growth. The protective cap layer also can have relatively low sputter yields to withstand erosion by ions. The emitter may be part of a system with an electron beam source. An electric field can be applied to the emitter and an electron beam can be generated from the emitter. The protective cap layer may be applied to the emitter by sputter deposition, atomic layer deposition (ALD), or ion sputtering.
    Type: Grant
    Filed: May 5, 2017
    Date of Patent: November 27, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Gildardo R. Delgado, Edgardo Garcia Berrios, Frances Hill, Rudy Garcia
  • Electron Beam Emitters with Ruthenium Coating
    Publication number: 20180174794
    Abstract: An emitter with a protective cap layer on an exterior surface of the emitter is disclosed. The emitter can have a diameter of 100 nm or less. The protective cap layer includes ruthenium. Ruthenium is resistant to oxidation and carbon growth. The protective cap layer also can have relatively low sputter yields to withstand erosion by ions. The emitter may be part of a system with an electron beam source. An electric field can be applied to the emitter and an electron beam can be generated from the emitter. The protective cap layer may be applied to the emitter by sputter deposition, atomic layer deposition (ALD), or ion sputtering.
    Type: Application
    Filed: May 5, 2017
    Publication date: June 21, 2018
    Inventors: Gildardo R. Delgado, Edgardo Garcia Berrios, Frances Hill, Rudy Garcia
  • High brightness boron-containing electron beam emitters for use in a vacuum environment
    Patent number: 9984846
    Abstract: An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 ?m or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 ?m or less.
    Type: Grant
    Filed: July 22, 2016
    Date of Patent: May 29, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: William G. Schultz, Gildardo R. Delgado, Frances Hill, Edgardo Garcia Berrios, Rudy Garcia
  • HIGH BRIGHTNESS BORON-CONTAINING ELECTRON BEAM EMITTERS FOR USE IN A VACUUM ENVIRONMENT
    Publication number: 20180005791
    Abstract: An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 ?m or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 ?m or less.
    Type: Application
    Filed: July 22, 2016
    Publication date: January 4, 2018
    Inventors: William G. Schultz, Gildardo R. Delgado, Frances Hill, Edgardo Garcia Berrios, Rudy Garcia