Patents by Inventor Francesco DeRege Thesauro

Francesco DeRege Thesauro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMP method for noble metals
    Patent number: 7097541
    Abstract: The invention provides a method of polishing a substrate comprising a noble metal comprising (i) contacting the substrate with a CMP system and (ii) abrading at least a portion of the substrate to polish the substrate. The CMP system comprises an abrasive and/or polishing pad, a liquid carrier, and a sulfonic acid compound.
    Type: Grant
    Filed: February 27, 2003
    Date of Patent: August 29, 2006
    Assignee: Cabot Microelectronics Corporation
    Inventors: Francesco DeRege Thesauro, Vlasta Brusic, Benjamin P. Bayer