Patents by Inventor Francis G. Celli

Francis G. Celli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for depositing a thin film
    Patent number: 5175019
    Abstract: A microwave plasma rector is disclosed comprising a vacuum chamber, a microwave generator for generating a microwave standing wave therein, inlet and outlet ports, a susceptor within the chamber, at least one dielectric plate and a heater for heating the susceptor. The dielectric plate alters the shape of the produced plasma from a sphere to a short bulging cylinder. The modified plasma ball results in increased thickness uniformity of the deposited material.
    Type: Grant
    Filed: September 30, 1991
    Date of Patent: December 29, 1992
    Assignee: Texas Instruments Incorporated
    Inventors: Andrew J. Purdes, Francis G. Celli