Patents by Inventor Franciscus Boekholt

Franciscus Boekholt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070263200
    Abstract: A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate is disclosed, the apparatus including a substrate table constructed to hold a substrate, a first clamping system configured to clamp the substrate table to a substrate table support structure, and a second clamping system configured to clamp a substrate to the substrate table after the substrate table has been clamped to the substrate table support structure.
    Type: Application
    Filed: May 15, 2006
    Publication date: November 15, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Rene Petrus Compen, Oleg Voznyi, Martijn Houben, Majid Bouchaibi, Franciscus Boekholt, Remko Wakker