Patents by Inventor Franciscus Johannes Leonardus HEUTZ

Franciscus Johannes Leonardus HEUTZ has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230314964
    Abstract: The present invention provides a fluid purging system (100) for an optical element (120), comprising a fluid guiding unit arranged to guide a fluid, provided by a fluid supply system, over at least a curved portion of an optical surface (122) of the optical element. The fluid guiding unit comprises a fluid inlet and a first nozzle unit (110) for providing a fluid to the optical surface. The fluid guiding unit being formed by at least a first wall portion (102) and at least a second wall portion (104), wherein the second wall portion being configured to face the optical surface and to follow a contour of the optical surface. The second wall portion comprises a second nozzle unit (112).
    Type: Application
    Filed: May 10, 2021
    Publication date: October 5, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: José Nilton FONSECA JUNIOR, Zhuangxiong HUANG, Franciscus Johannes Leonardus HEUTZ, Ferdy MIGCHELBRINK, Henricus Anita Jozef Wilhelmus VAN DE VEN, Ramo OMEROVIC, Emericus Antoon Theodorus VAN DEN AKKER
  • Publication number: 20230205102
    Abstract: The present invention provides a fluid purging system (100) for an optical element (30), comprising a ring and a fluid supply system (40). The ring being formed of a body entirely surrounding the optical element, the ring defining a space (5) radially inwards thereof and adjacent to the optical element. The ring is formed by at least one first wall portion (10) and at least one second wall portion (20A;20B), wherein an average height of the first wall portion is greater than an average height of the second wall portion. The fluid supply system is positioned radially outwards of the ring and configured to supply fluid to pass over the at least one second wall portion to the space.
    Type: Application
    Filed: April 30, 2021
    Publication date: June 29, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: José Nilton FONSECA JUNIOR, Franciscus Johannes Leonardus HEUTZ, Zhuangxiong HUANG, Ferdy MIGCHELBRINK