Abstract: A spectral selection component for XUV radiation comprises a first multilayer mirror for receiving an XUV radiation beam along an input axis located in a first plane of incidence. The spectral selection component comprises a second multilayer mirror for receiving, in a second plane of incidence, an XUV radiation beam reflected by the first mirror in order to transmit the radiation to an output axis of the spectral selection component. One of the first and second mirrors has a first, high-pass energy spectral response, with a flank on the low-energy side with a steepness that is greater than 0.1 eV?1, whereas the other mirror has a second, low-pass energy spectral response, with a flank on the high-energy side with a steepness that is greater than 0.1 eV?1. The first and second mirrors may have an only partial overlap in their spectral energy responses.

Abstract: A spectral selection component for XUV radiation, includes a first multilayer mirror for receiving an XUV radiation beam along an input axis located in a first plane of incidence and a second multilayer mirror for receiving, in a second plane of incidence, an XUV radiation beam reflected by the first mirror in order to transmit the radiation to an output axis of the spectral selection component. One of the first and second mirrors has a first, high-pass energy spectral response, with a flank on the low-energy side with a steepness that is greater than 0.1 eV?1 and a rejection of low energies that is greater than 20, whereas the other mirror has a second, low-pass energy spectral response, with a flank on the high-energy side with a steepness that is greater than 0.1 eV?1 and a rejection of high energies that is greater than 20. Furthermore, the first and second mirrors have an only partial overlap in their spectral energy responses.