Patents by Inventor Franck Procureur

Franck Procureur has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • On wafer evaporation installation
    Patent number: 6001184
    Abstract: This invention relates to an evaporation installation of the type including a frame rotatably hanging around a first vertical shaft and supporting at least three arms for receiving at least three concave supports of wafers to be processed, rotatably mounted around secondary shafts supported by the arms, the arms being inscribed in a cone which is coaxial to the first shaft so that the secondary shafts have a rotating motion in a plane perpendicular to the vertical shaft. The supports are disposed so as to overlap.
    Type: Grant
    Filed: December 17, 1996
    Date of Patent: December 14, 1999
    Assignee: SGS-Thomson Microelectronics S.A.
    Inventor: Franck Procureur