Abstract: The invention relates to an evaporation cell (1) for vacuum evaporation chamber, the evaporation cell (1) comprising a crucible (5), the crucible (5) being adapted to receive a solid or liquid material to be sublimated or evaporated, heating means (3) to heat the material in the crucible, a nozzle (6) placed at an open end of the crucible (5), the nozzle (6) comprising a frustoconical portion (61) having an opening (60) adapted for the passage of a flow of evaporated or sublimated material towards the vacuum evaporation chamber, and a cover (7) placed on the nozzle (6), the cover (7) having an opening (70) arranged about the frustoconical portion (61) of the nozzle (6). According to the invention, the cover (7) has at least one frustoconical portion (71, 72, 73) arranged about the frustoconical portion (61) of the nozzle (6), the cover (7) forming a thermal barrier between the crucible (5) and the vacuum evaporation chamber.

Abstract: The invention relates to an evaporation cell (1) for vacuum evaporation chamber, the evaporation cell (1) comprising a crucible (5), the crucible (5) being adapted to receive a solid or liquid material to be sublimated or evaporated, heating means (3) to heat the material in the crucible, a nozzle (6) placed at an open end of the crucible (5), the nozzle (6) comprising a frustoconical portion (61) having an opening (60) adapted for the passage of a flow of evaporated or sublimated material towards the vacuum evaporation chamber, and a cover (7) placed on the nozzle (6), the cover (7) having an opening (70) arranged about the frustoconical portion (61) of the nozzle (6). According to the invention, the cover (7) has at least one frustoconical portion (71, 72, 73) arranged about the frustoconical portion (61) of the nozzle (6), the cover (7) forming a thermal barrier between the crucible (5) and the vacuum evaporation chamber.

Abstract: Disclosed is an evaporation device including an evaporation cell including heating element and a crucible having an upper open end and a lower closed bottom, intended to receive a load, the device being adapted to generate a flow of vapour-phase material by evaporation or sublimation of the load material. The evaporation device includes a filtering insert including an upper part having a conical opening intended to be placed at the open end of the crucible, and a lower part including, from the top to the bottom, a plate having at least one opening and one grid, the lower part being intended to be placed in the crucible between the upper part and the load. Also disclosed is an apparatus and a method for depositing a film of material on a substrate.

Abstract: An evaporation cell for evaporating a material onto a substrate placed in a vacuum deposition chamber, includes an inner enclosure delimiting an evaporation chamber for receiving a crucible containing the material and having an opening for inserting the crucible into the evaporation chamber; evaporation elements placed at the periphery of the inner enclosure for placing the crucible in evaporation conditions; an injection duct for transporting a flow of vapour of the evaporated material from the evaporation chamber to an injector located in the vacuum deposition chamber; and a stop valve placed on the injection duct. The evaporation cell includes insertion opening/shutting elements that have an open configuration for inserting the crucible into the evaporation chamber, and a closed configuration for confining the evaporation chamber in communication with the vacuum deposition chamber via the injection duct, and opening elements to provide an evaporation opening in an envelope of the crucible.

Abstract: A method for reloading an evaporation cell intended to evaporate a material onto a substrate placed in a vacuum deposition chamber, a first crucible containing the material to be evaporated being engaged with an evaporation chamber of the cell, and elements for placing the first crucible in conditions of evaporation to generate a flow of vapor of the material, the method including: loading a second crucible containing the material to be evaporated in a loading chamber previously isolated from the adjacent evaporation chamber, the pressure in the loading chamber being then substantially higher than that in the vacuum deposition chamber; confining the pressure inside the loading chamber to a level comparable to that of the evaporation chamber during the evaporation of the first crucible; transferring the first crucible to the loading chamber, engaging the second crucible with the evaporation chamber, and placing the second crucible in conditions of evaporation.

Abstract: An injector for a vacuum evaporation source includes an injection duct (1) having a longitudinal axis (11) and an inlet port (2) able to be connected to a vacuum evaporation source, and at least one nozzle (3) for diffusing a vaporized material, the nozzle (3) having a lateral face (4), and an upper face (5). The nozzle (3) includes a main channel (6) emerging outside the injection duct (1) and at least a lateral feeding channel (7) connecting the interior of the injection duct (1) to the main channel (6). The lateral feeding channel (7) has a lateral orifice (8) emerging inside the injection duct (1) through the lateral face (4) of the nozzle (3) for avoiding the clogging of the nozzle (3) by oxidized materials.

Abstract: An injector for a vacuum vapour deposition system, includes an injection duct suitable for receiving vaporized materials from a vacuum evaporation source and a diffuser having a plurality of nozzles for diffusing the vaporized materials into a vacuum deposition chamber, each nozzle including a channel suitable for connecting the injection duct to the deposition chamber. The diffuser has a spatially varying nozzle distribution. A process for calibrating an injector and a process for manufacturing a diffuser for an injector are also described.

Abstract: An injector for a vacuum evaporation source includes an injection duct (1) having a longitudinal axis (11) and an inlet port (2) able to be connected to a vacuum evaporation source, and at least one nozzle (3) for diffusing a vaporized material, the nozzle (3) having a lateral face (4), and an upper face (5). The nozzle (3) includes a main channel (6) emerging outside the injection duct (1) and at least a lateral feeding channel (7) connecting the interior of the injection duct (1) to the main channel (6). The lateral feeding channel (7) has a lateral orifice (8) emerging inside the injection duct (1) through the lateral face (4) of the nozzle (3) for avoiding the clogging of the nozzle (3) by oxidized materials.

Abstract: A vacuum deposition apparatus comprising an enclosure adapted to receive a substrate to be treated and placed under a vacuum; at least one injector that generates a molecular beam of vapor of an organic material the injector comprising a conduit located inside the enclosure and traversing an injection wall of the enclosure to form an outer nozzle adapted in such a manner as to be hermetically connected in a detachable manner to an organic material supply, wherein the supply is a bottle whose neck is adapted to be introduced into the nozzle; an outer heating apparatus located on both sides of an injection wall and surrounding the bottle; an inner heating apparatus surrounding the conduit; and a regulatable valve permitting regulation of conductance of the injector in the enclosure.

Abstract: Epitaxy equipment including an epitaxy chamber under vacuum containing a substrate support and at least one cell under vacuum for evaporation of epitaxy material closed by a diaphragm having at least one opening and communicating with the epitaxy chamber by a connecting flange, and a mobile plate positioned opposite the diaphragm such that the distance of the plate from an exterior surface of the diaphragm is variable and has a section corresponding to a section of the diaphragm and a molecular beam is formed at the level of a zone surrounding the plate.

Abstract: Kindly enter the following into the Official File: