Patents by Inventor Francois Henzelin

Francois Henzelin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical imaging device having at least one system diaphragm
    Patent number: 8009343
    Abstract: An optical imaging device (PL), in particular an objective for semiconductor lithography, is provided with at least one system diaphragm. The system diaphragm comprises a multiplicity of mobile plates, which are rotatably mounted. The plates have a spherical curvature.
    Type: Grant
    Filed: July 2, 2004
    Date of Patent: August 30, 2011
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Bernhard Gellrich, Thomas Bischoff, Hermann Bieg, Martin Huber, Francois Henzelin, Gerhard Szekely, Uy-Liem Nguyen, Martin E. Humphries
  • Optical Imaging Device Having At Least One System Diaphragm
    Publication number: 20090021820
    Abstract: An optical imaging device (PL), in particular an objective for semiconductor lithography, is provided with at least one system diaphragm. The system diaphragm comprises a multiplicity of mobile plates, which are rotatably mounted. The plates have a spherical curvature.
    Type: Application
    Filed: July 2, 2004
    Publication date: January 22, 2009
    Applicant: CARL ZEISS SMT AG
    Inventors: Bernhard Gellrich, Thomas Bischoff, Hermann Bieg, Martin Huber, Francois Henzelin, Gerhard Szekely, Uy-Liem Nguyen, Martin E. Humphries