Abstract: In a vacuum processing chamber, a method and apparatus for securing an article to a ceramic plate comprises forming a bore in the ceramic plate, forming a counterbore in the ceramic plate, the counterbore having a center which is offset from a center of the bore, inserting a nut into the counterbore, the nut having a threaded hole therein which is offset from the center of the nut to the same degree that the center of the bore is offset from the center of the counterbore, securing the article to the ceramic plate with a screw which is received into the threaded hole of the nut, and fixing an insulating plug having an outer diameter substantially equal to the diameter of the counterbore in the counterbore adjacent to the nut.

Abstract: In a vacuum processing chamber, a drive assembly for moving an article such as a substrate, clamp or pin lifter. The drive assembly includes at least one cable actuated assembly having a pin and housing mechanically coupled to a cable and sleeve, respectively, so that movement of the cable within the sleeve causes the pin to move within the housing. The other ends of the cable and sleeve are connected to a cable linkage box which is driven by an actuator to move the cable within the sleeve. A plurality of cable actuated assemblies can be attached to a substrate support at desired locations such that the pins extend through holes in the substrate support. The cables to which the pins are coupled can be simultaneously driven by the actuator to lift substrates off of the substrate support.