Abstract: Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source, including a main, first collector stage, with a concave collector mirror placed in front of the source at a distance of greater than 250 mm and pierced by a central hole, and a convex mirror placed behind the concave mirror level with the source and pierced by a central hole, and at least a second collector stage with a concave collector mirror placed in front of the stage and pierced by a central hole and a convex mirror placed behind the concave mirror.

Abstract: The invention relates to an illuminator for a photolithography device. The invention comprises: a source (1?) of a light beam (10) which is used to illuminate a mask (8) and to expose an area of a wafer (W); at least one main array (4) of microlenses; and a shutter (6) consisting of at least one shutter plate (61) comprising at least one part (612) that is opaque to the light beam (10) and a plurality of parts (610) that are transparent to the beam, whereby said plate (61) can be moved in relation to the beam (10) along a direction of movement (X) that is essentially parallel to the plate, such that the opaque part (612) can at least partially block the light beam or such that the transparent parts can at least partially enable the passage of the light beam (10).

Abstract: An optical imaging device for forming optical images of fingerprints of a finger, the device comprising: an optical plate having a portion at one end of a main face that is provided for illuminating the finger through the plate, the reflected light beam propagating with multiple reflections inside the plate to the other end thereof, which end presents an inclined end face; a focusing lens facing the end face with the lens having its axis situated in the midplane of the plate; and a mirror for directing the light beam leaving the end face onto the axis of the lens.

Abstract: The invention relates to an illuminator for a photolithography device. The invention comprises: a source (1?) of a light beam (10) which is used to illuminate a mask (8) and to expose an area of a wafer (W); at least one main array (4) of microlenses; and a shutter (6) consisting of at least one shutter plate (61) comprising at least one part (612) that is opaque to the light beam (10) and a plurality of parts (610) that are transparent to the beam, whereby said plate (61) can be moved in relation to the beam (10) along a direction of movement (X) that is essentially parallel to the plate, such that the opaque part (612) can at least partially block the light beam or such that the transparent parts can at least partially enable the passage of the light beam (10).

Abstract: Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source (S), comprising a main, first collector stage (E1), with a concave collector mirror (2) placed in front of the source (S) at a distance of greater than 250 mm and pierced by a central hole (3) and a convex mirror (4) placed behind the concave mirror level with the source and pierced by a central hole (5), and at least a second collector stage (E2) with a concave collector mirror (7) placed in front of the stage (E1) and pierced by a central hole (8) and a convex mirror (9) placed behind the concave mirror.

Abstract: The invention relates to an optical device which is used to form a fingerprint image. The inventive device comprises an optical plate having a first main face on which a finger is placed, a first side face comprising a converging mirror, and a second side face which is disposed opposite the first side face and which forms an output face, a focusing lens being disposed opposite said output face. According to the invention, the first main face forms an angle greater than 90° with output face, such that: the incidence of light rays on the first main face, inside the optical plate, is increased; the stray radiation at the output face is reduced; and a thinner plate can be used.

Abstract: An optical imaging device for forming optical images of fingerprints of a finger, the device comprising: an optical plate having a portion at one end of a main face that is provided for illuminating the finger through the plate, the reflected light beam propagating with multiple reflections inside the plate to the other end thereof, which end presents an inclined end face; a focusing lens facing the end face with the lens having its axis situated in the midplane of the plate; and a mirror for directing the light beam leaving the end face onto the axis of the lens.

Abstract: The invention relates to an optical device which is used to form a fingerprint image. The inventive device comprises an optical plate (1) having a first main face (2) on which a finger (3) is placed, a first side face (4) comprising a converging mirror, and a second side face (5) which is disposed opposite the first side face and which forms an output face, a focusing lens (9) being disposed opposite said output face (5). According to the invention, the first main face (2) forms an angle greater than 90° with output face (5), such that: the incidence of light rays on the first main face, inside the optical plate, is increased; the stray radiation at the output face is reduced; and a thinner plate can be used.