Patents by Inventor Francy Abraham

Francy Abraham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Edge inspection
    Patent number: 7822260
    Abstract: A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.
    Type: Grant
    Filed: March 4, 2008
    Date of Patent: October 26, 2010
    Assignee: Rudolph Technologies, Inc.
    Inventors: Cory Watkins, Mark Harless, Francy Abraham
  • EDGE INSPECTION
    Publication number: 20080212084
    Abstract: A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.
    Type: Application
    Filed: March 4, 2008
    Publication date: September 4, 2008
    Inventors: Cory Watkins, Mark Harless, Francy Abraham
  • Edge inspection
    Patent number: 7340087
    Abstract: A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.
    Type: Grant
    Filed: July 14, 2004
    Date of Patent: March 4, 2008
    Assignee: Rudolph Technologies, Inc.
    Inventors: Cory Watkins, Mark Harless, Francy Abraham
  • Edge inspection
    Publication number: 20050036671
    Abstract: A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.
    Type: Application
    Filed: July 14, 2004
    Publication date: February 17, 2005
    Inventors: Cory Watkins, Mark Harless, Francy Abraham