Patents by Inventor Frank A. J. M. Driessen

Frank A. J. M. Driessen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a semiconductor device in a silicon body, a surface of said silicon body being provided with an alignment grating and an at least partly recessed oxide pattern
    Patent number: 6255189
    Abstract: In the known process for manufacturing a semiconductor device, in particular an integrated circuit, in a silicon body, a surface of said silicon body is provided with an alignment grating formed in accordance with a pattern of strips of adjacent elevations and valleys, and with a partially recessed oxide pattern at the location of a semiconductor device by subsequently providing the surface of the silicon body with a masking layer of anti-oxidation material having apertures at the location of the semiconductor device and subjecting the silicon body to an oxidation treatment. The process is simplified considerably by applying the alignment pattern (7) simultaneously with the partially recessed oxide pattern (12) of the semiconductor device (5).
    Type: Grant
    Filed: October 19, 1999
    Date of Patent: July 3, 2001
    Assignee: U.S. Philips Corporation
    Inventors: Christiaan J. Muller, Frank A. J. M. Driessen