Patents by Inventor Frank Abboud

Frank Abboud has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bi-directional electron beam scanning apparatus
    Patent number: 6570155
    Abstract: The present invention relates to bi-directional raster scanning (“serpentine scanning”) for an electron beam lithography system. Improved circuit components are described for generating the true triangular waveform required in bi-directional scanning. The circuitry of the present invention provides control of signal amplitude, frequency and phase to better than 1 ppm by making use of signal generation circuitry described pursuant to the present invention. A series of coarse and fine tuning delay adjustments pursuant to the present invention accommodate a variety of operating conditions. Another embodiment of the present invention relates to an optimization of the data path hardware for bi-directional scanning, including isolating a section of the data path hardware specifically to provide calibration scans. The delay circuit built into the data preparation hardware helps compensate for delays caused by finite bandwidth in the analogue drivers.
    Type: Grant
    Filed: April 11, 2000
    Date of Patent: May 27, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Richard Prior, Frank Abboud